SCA121T Series Data Sheet THE SCA121T DUAL AXIS INCLINOMETER MODULES The SCA121T Series contain 3D-MEMS-based dual axis inclinometer modules that provide instrumentation grade performance for leveling applications in harsh environment. The measuring axes of the sensing elements are parallel to the mounting plane and orthogonal to each other. Low temperature dependency, high resolution and low noise, together a with robust sensing element design, make the SCA121T the ideal choice for leveling instruments. The Murata inclinometers are insensitive to vibration, due to their over damped sensing elements, and can withstand mechanical shocks of up to 20000 g. Features • Dual axis inclination measurement (X and Y) • RoHS compliant • Measuring ranges ±30° and ± 90° • 0.0025° resolution (10 Hz BW, analog output) • Sensing element controlled over damped frequency response (-3dB 18Hz) • Robust design, high shock durability (20000g) • High stability over temperature and time • Single +5 V supply and unregulated 7…35V supply Applications • Platform leveling and stabilization • Leveling instruments • 360° vertical orientation measurement • Construction levels Murata Electronics Oy Subject to changes 1/5 www.muratamems.fi Doc.Nr. 82 1274 00 Rev.A

SCA121T Series TABLE OF CONTENTS The SCA121T Dual Axis Inclinometer modules ..................................................................... 1 Features............................................................................................................................................. 1 Applications ...................................................................................................................................... 1 Table of Contents...................................................................................................................... 2 1 Electrical Specifications ..................................................................................................... 3 1.1 Absolute Maximum Ratings ................................................................................................... 3 1.2 Performance Characteristics .................................................................................................. 3 1.3 Electrical Characteristics ....................................................................................................... 4 1.4 Electrical Connection.............................................................................................................. 4 2 Functional Description ....................................................................................................... 4 2.1 Measuring Directions .............................................................................................................. 4 2.2 Voltage to Angle Conversion ................................................................................................. 4 2.3 Ratiometric Output .................................................................................................................. 5 3 Mechanical Specifications .................................................................................................. 5 3.1 Sensor dimensions ................................................................................................................. 5 Murata Electronics Oy Subject to changes 2/5 www.muratamems.fi Doc. nr. 82 1274 00 Rev.A

SCA121T Series 1 Electrical Specifications The SCA121T product family comprises three versions, the SCA121T-D03, the SCA121T-D05 and the SCA121T-D07 that differs in measurement range and supply voltage. The product version specific performance specifications are listed in the table SCA121T performance characteristics below. 1.1 Absolute Maximum Ratings Supply voltage SCA121T-D05(VDD) Regulated -0.3 V to +5.5V Supply voltage SCA121T-D03 and D07 Unregulated -0.3 V to +35V Voltage at input / output pins -0.3V to 5.3 Storage temperature -55°C to +125°C Operating temperature -40°C to +125°C Mechanical shock Drop from 1 meter onto a concrete surface (20000g). Powered or non-powered 1.2 Performance Characteristics Parameter Condition SCA121T- SCA121T SCA121T Units D03 -D05 -D07 Measuring range Nominal ±90 ±90 ±30 ° ±1 ±1 ±0.5 g Supply Voltage 7…35 5±0.25 7…35 V Offset (Output at 0g) 2.5 Vdd/2 2.5 V Offset calibration error Max deviation ±1.5 ±1.5 ±1.5 ° Sensitivity 2 2 4 V/g between 0…1° (1 35 35 70 mV/° Sensitivity calibration ±1.5 ±1.5 ±1.5 % error Offset temperature -25…85°C ±1 ±1 ±1 ° dependency 0…70°C ±0.5 ±0.5 ±0.5 ° Sensitivity temperature -25...85°C -1.5...+0.5 -1.5...+0.5 -1.5...+0.5 % dependency 0…70°C -0.8...+0.3 -0.8...+0.3 -0.8...+0.3 % Typical non-linearity Measuring range ±0.57 ±0.57 ±0.11 ° Frequency response –3dB LP (2 8-28 8-28 8-28 Hz Ratiometric error Vdd = 4.75...5.25V ±1 % Cross-axis sensitivity Max. 4 4 % Note 1. The angle output has SIN curve relationship to voltage output Note 2. The frequency response is determined by the sensing element’s internal gas damping. Murata Electronics Oy Subject to changes 3/5 www.muratamems.fi Doc. nr. 82 1274 00 Rev.A

SCA121T Series 1.3 Electrical Characteristics Parameter Condition Min. Typ Max. Units Current consumption Vdd = 5 V; No load 5 8 mA Operating temperature -25 +85 °C Analog resistive output load Vout to Vdd or GND 10 kOhm Analog capacitive output load Vout to Vdd or GND 20 nF Start-up delay Reset and parity check 10 ms 1.4 Electrical Connection Wire Color Name Function Blue GND Ground Red Vdd Power supply Yellow Out X X-axis output Green Out Y Y-axis output White NC Not Connected 2 Functional Description 2.1 Measuring Directions Figure 1. The measuring directions of the SCA121T 2.2 Voltage to Angle Conversion Analog output can be transferred to angle using the following equation for conversion: V −Offset α=arcsin out   Sensitivity  Where: Offset = output of the device at 0° inclination position, Sensitivity is the sensitivity of the device and V is the output of the SCA121T. The nominal offset is 2.5 V and the sensitivity is 4 Dout V/g for the SCA121T-D07 and 2 V/g for the SCA121T-D03 and SCA121T-D05. Angles close to 0° inclination can be estimated quite accurately with straight line conversion but for the best possible accuracy, arcsine conversion is recommended to be used. The following table shows the angle measurement error if straight line conversion is used. Murata Electronics Oy Subject to changes 4/5 www.muratamems.fi Doc. nr. 82 1274 00 Rev.A

SCA121T Series Straight line conversion equation: V −Offset α= out Sensitivity Where: Sensitivity = 70mV/° with SCA121T-D07 or Sensitivity= 35mV/° with SCA121T-D03 and SCA121T-D05 Tilt angle [°] Straight line conversion error [°] 0 0 1 0.0027 2 0.0058 3 0.0094 4 0.0140 5 0.0198 10 0.0787 15 0.2185 30 1.668 2.3 Ratiometric Output Ratiometric output means that the zero offset point and sensitivity of the sensor are proportional to the supply voltage. If the SCA121T-D05 supply voltage is fluctuating the SCA121T-D05 output will also vary. When the same reference voltage for both the SCA121T-D05 sensor module and the measuring part (A/D-converter) is used, the error caused by reference voltage variation is automatically compensated for. 3 Mechanical Specifications Cable length: -D03,-D07 30cm -D05 110cm Cable type: UL/CSA listed, PUR black Cable diam.: 6±0.2mm Leads: 5 x 0.14mm2 Total weight: Approx. 60 grams Protection class: IP66 Housing: Zinc casting with passivation Mounting: The sensor module is to be mounted on a flat and smooth surface with 2 screws, dimension M4. Mounting torque 5 ±1Nm 3.1 Sensor dimensions Figure 2. Mechanical dimensions of the SCA121T (Dimensions in mm) Murata Electronics Oy Subject to changes 5/5 www.muratamems.fi Doc. nr. 82 1274 00 Rev.A