Freescale Semiconductor Document Number: MPX53 Data Sheet: Technical Data Rev. 7.1, 07/2015 MPX53, 0 to 50 kPa, Differential and Gauge, Uncompensated, MPX53 Silicon Pressure Sensors The MPX53 series silicon piezoresistive pressure sensors provide a very Unibody packages accurate and linear voltage output, directly proportional to the applied pressure. These standard, uncompensated sensors permit manufacturers to design and add their own external temperature compensating and signal conditioning networks. Compensation techniques are simplified because of the predictability of Freescale's single element strain gauge design. Features MPX53 Case 98ASB42280B • Patented silicon shear stress strain gauge design • Ratiometric to supply voltage • Easy to use chip carrier package options • 60 mV span (typical) • Differential and gauge options Typical applications • Air movement control MPX53DP MPX53GP Case 98ASB14912C Case 98ASB14911C • Environmental control systems • Level indicators Front view • Leak detection • Medical instrumentation • Industrial controls • Pneumatic control systems • Robotics Pin 1 identification 1 2 3 4 D T S T GNVOUVVOU + - Pinout Ordering information # of Ports Pressure type Device Device name Shipping Package None Single Dual Gauge Differential Absolute marking Unibody package MPX53D Rail 98ASB42280B • • MPX53D MPX53DP Rail 98ASB14912C • • MPX53DP MPX53GP Rail 98ASB14911C • • MPX53GP Freescale reserves the right to change the detail specifications as may be required to permit improvements in the design of its products. © 2007-2009, 2015 Freescale Semiconductor, Inc. All rights reserved.

Contents 1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 1.1 Block diagram. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 1.2 Pinout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 2 Mechanical and Electrical Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 2.1 Maximum ratings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 2.2 Operating characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 2.3 Voltage output versus applied differential pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2.4 Temperature compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2.5 Linearity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 3 Package Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3.1 Pressure (P1)/Vacuum (P2) side identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 3.2 Package dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 4 Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Related Documentation The MPX53 device features and operations are described in a variety of reference manuals, user guides, and application notes. To find the most-current versions of these documents: 1. Go to the Freescale homepage at: http://www.freescale.com/ 2. In the Keyword search box at the top of the page, enter the device number MPX53. 3. In the Refine Your Result pane on the left, click on the Documentation link. MPX53 Sensors 2 Freescale Semiconductor, Inc.

1 General Description 1.1 Block diagram Figure1 shows a schematic of the internal circuitry on the stand-alone pressure sensor chip. 3 +V S 2 +V OUT Sensor 4 -V OUT 1 GND Figure1. Uncompensated pressure sensor schematic 1.2 Pinout Pin 1 identification 1 2 3 4 D T S T GN VOUV VOU + - Figure2. Device pinout (front view) Table1. Pin functions Pin Name Function 1 GND Ground, denoted by notch. 2 +V Output voltage OUT 3 V Voltage supply S 4 -V Output voltage OUT MPX53 Sensors Freescale Semiconductor, Inc. 3

2 Mechanical and Electrical Specifications 2.1 Maximum ratings Table2. Maximum ratings(1) Rating Symbol Value Unit Maximum Pressure (P1 > P2) P 175 kPa MAX Burst Pressure (P1 > P2) P 200 kPa Burst Storage Temperature T –40 to +125 °C STG Operating Temperature T –40 to +125 °C A 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2.2 Operating characteristics Table3. Operating characteristics (V = 3.0 Vdc, T = 25°C unless otherwise noted, P1 > P2) S A Characteristic Symbol Min Typ Max Units Pressure range(1) P 0 — 50 kPa OP Supply voltage(2) V — 3.0 6.0 V S DC Supply current I — 6.0 — mAdc O Full-scale span(3) V 45 60 90 mV FSS Offset(4) V 0 20 35 mV OFF Sensitivity ΔV/ΔΡ — 1.2 — mV/kPa Linearity — –0.6 — 0.4 %V FSS Pressure hysteresis (0 to 50 kPa) — — ±0.1 — %V FSS Temperature hysteresis — — ±0.5 — %V FSS Temperature coefficient of full-scale span TCV –0.22 — -0.16 %V /°C FSS FSS Temperature coefficient of offset TCV — ±15 — µV/°C OFF Temperature coefficient of resistance TCR 0.21 — 0.27 %Z /°C IN Input impedance Z 355 — 505 Ω IN Output impedance Z 750 — 1875 Ω OUT Response time(5) (10% to 90%) t — 1.0 — ms R Warm-up time(6) — — 20 — ms Offset stability(7) — — ±0.5 — %V FSS 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full-scale span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the FSS minimum rated pressure. 4. Offset (V ) is defined as the output voltage at the minimum rated pressure. OFF 5. Response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized. 7. Offset stability is the product’s output deviation when subjected to 1000 hours of pulsed pressure, temperature cycling with bias test. MPX53 Sensors 4 Freescale Semiconductor, Inc.

2.3 Voltage output versus applied differential pressure The differential voltage output of the sensor is directly proportional to the differential pressure (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1). 2.4 Temperature compensation Figure3 shows the typical output characteristics of the MPX53 series over temperature. The piezoresistive pressure sensor element is a semiconductor device which gives an electrical output signal proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a thin silicon diaphragm by the applied pressure. Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature compensated if it is to be used over an extensive temperature range. Temperature compensation and offset calibration can be achieved rather simply with additional resistive components, or by designing your system using the MPX2053 series sensors. Several approaches to external temperature compensation over –40 to +125°C and 0 to +80°C are presented in Freescale Application Note, AN840. 2.5 Linearity Linearity refers to how well a transducer's output follows the equation: V = V + (sensitivity x P) over the operating pressure OUT OFF range (see Figure3). There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2)a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale’s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Figure4 illustrates the differential or gauge configuration in the unibody chip carrier (Case 98ASB42280B). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX53 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Refer to application note AN3728, for more information regarding media compatibility. 100 90 MPX53 +25°C V = 3 Vdc 80 S –40°C P1 > P2 70 c) 60 Span d mV 50 Range ut ( 40 (Typ) p +125ºC ut 30 O 20 Offset 10 (Typ) 0 PSI 0 1 2 3 4 5 6 7 8 kPa 0 10 20 30 40 50 Pressure Differential Figure3. Output vs. pressure differential MPX53 Sensors Freescale Semiconductor, Inc. 5

90 Linearity 80 70 Actual 60 Span 50 (V ) FSS c) Vd 40 m put ( 30 Theoretical ut O 20 Offset 10 (V ) OFF 0 0 MAX P Pressure (kPa) OP Figure4. Linearity specification comparison Stainless Steel Silicone Metal Cover Die Coat Die P1 Epoxy Wire Bond Case Lead Frame RTV Die Bond P2 Figure5. Unibody package — cross-sectional diagram (not to scale) MPX53 Sensors 6 Freescale Semiconductor, Inc.

3 Package Information 3.1 Pressure (P1)/Vacuum (P2) side identification Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The Freescale MPX53 pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the following table. Part number Case number Pressure (P1) side identifier MPX53D 98ASB42280B Stainless steep cap MPX53DP 98ASB14912C Side with port marking MPX53GP 98ASB14911C Side with port attached MPX53 Sensors Freescale Semiconductor, Inc. 7

3.2 Package dimensions This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB42280B.pdf. Case 98ASB42280B, Unibody package MPX53 Sensors 8 Freescale Semiconductor, Inc.

This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB14912C.pdf. Case 98ASB14912C, Unibody package MPX53 Sensors Freescale Semiconductor, Inc. 9

This drawing is located at http://cache.freescale.com/files/shared/doc/package_info/98ASB14911C.pdf. NOTES: SEATING -T- -A- 1. DIMENSIONING AND TOLERANCING PER ANSI PLANE U Y14.5M, 1982. R L 2. CONTROLLING DIMENSION: INCH. H INCHES MILLIMETERS DIM MIN MAX MIN MAX A 1.145 1.175 29.08 29.85 N B 0.685 0.715 17.40 18.16 PORT #1 -Q- C 0.305 0.325 7.75 8.26 POSITIVE PRESSURE D 0.016 0.020 0.41 0.51 (P1) F 0.048 0.064 1.22 1.63 G 0.100 BSC 2.54 BSC B H 0.182 0.194 4.62 4.93 J 0.014 0.016 0.36 0.41 K 0.695 0.725 17.65 18.42 1 2 3 4 L 0.290 0.300 7.37 7.62 PIN 1 K N 0.420 0.440 10.67 11.18 -P- P 0.153 0.159 3.89 4.04 0.25 (0.010) M T Q S S QR 00..125330 00..125590 35..8894 46..0345 J F US 0.202.0910 B0S.2C40 5.2539.11 BS6C.10 C G D4 PL 0.13 (0.005) M T S S Q S STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4 -OUTPUT Case 98ASB14911C, Unibody package MPX53 Sensors 10 Freescale Semiconductor, Inc.

4 Revision History Table4. Revision history Revision Revision Description number date • Updated format. 7.1 06/2015 • Removed obsolute MPXV53GC7U option and package drawing. • Updated package outline drawings with current versions. MPX53 Sensors Freescale Semiconductor, Inc. 11

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