Airflow Sensors line Guide Go with the flow of engineering leadership. All airflow sensors and temperature sensing elements. This provides rapid response operate on heat transfer — flow and differential pressure. to the air or gas flow and amount and direction, delivering But Honeywell Sensing and Control (S&C) offers advanced a proportional output voltage. Amplified versions provide chip design, manufacturing techniques and microstructure an enhanced output signal and less external circuitry, while technology, allowing our microbridge to be notably faster, smaller unamplified versions allow additional external circuit options. and more sensitive. Our silicon chip design is created from a thin- What’s more, a variety of port styles provides greater application film, thermally isolated bridge structure, containing both heater flexibility. FEATURES HonEywEll ZEpHyR™ AiRFlow increasing the options for integrating the %FS resolution (analog) increases SEnSoRS sensor into the application. Customizable ability to sense small airflow changes, HAF Series-High Accuracy. flow ranges and configurable package allowing customers to more precisely ±50 SCCM to ±750 SCCM styles meet specific end-user needs. Full control their application. Low 3.3 Vdc Features: Total Error Band (TEB) as low as calibration and temperature compensation operating voltage option and low power ±0.25 %FSS • Fast response time typically allow customer to remove consumption allow for use in battery- • Wide range of airflows • Customizable additional components associated driven and other portable applications. flow ranges and configurable package with signal conditioning from the PCB, ASIC-based I2C digital output compatibility styles • Full calibration and temperature reducing PCB size as well as costs often eases integration to microprocessors or compensation • High sensitivity at very associated with those components (e.g., microcontrollers, reducing PCB complexity low flows • Linear output • High stability acquisition, inventory, assembly). High and component count. Insensitivity to • Low pressure drop • High 12-bit sensitivity at very low flows provides mounting orientation allows customer resolution (digital), 0.039 %FS resolution for faster response time at the onset or to position the sensor in most optimal (analog) • Low 3.3 Vdc operating voltage cessation of flow. Linear output provides point in the system, eliminating concern • ASIC-based I2C output compatibility a more intuitive sensor signal than the for positional effects. Insensitivity to (digital) • Insensitivity to mounting raw output of basic airflow sensors, altitude eliminates customer-implemented orientation • Insensitivity to altitude which can help reduce production costs, altitude adjustments in the system, • Small size • RoHS-compliant materials design, and implementation time. High easing integration and reducing stability reduces errors due to thermal production costs by not having to Benefits: Total Error Band (TEB) as low effects and null shift to provide accurate purchase additional sensors for altitude as ±0.25 %FSS allows for precise airflow readings over time, often eliminating adjustments. Small size occupies less measurement, often ideal for demanding need for system calibration after PCB space on PCB, allowing easier fit and applications with high accuracy mount and periodically over time. Low potentially reducing production costs; requirements. Fast response time allows pressure drop typically improves patient PCB size may also be reduced for easier a customer’s application to respond comfort in medical applications, and fit into space-constrained applications. quickly to airflow change, important in reduces noise and system wear on Designed for use in medical equipment critical medical (e.g., anesthesia) and other components such as motors and such as anesthesia delivery machines, industrial (e.g., fume hood) applications. pumps. High 12-bit resolution (digital) ventricular assist devices (heart pumps), Measures mass flow at standard flow increases ability to sense small airflow hospital diagnostics (spectrometry, gas ranges of ±50, ±100, ±200, ±400 or changes, allowing customers to more chromatography), nebulizers, oxygen ±750 SCCM, or custom flow ranges, precisely control their application; 0.039 concentrators, sleep apnea machines, continued on page 5

Airflow Sensors line Guide our technology is most sensitive to your needs. Honeywell S&C offers Honeywell Zephyr™ specially crafted airflow sensor Airflow Sensors HAF Series-High Accuracy HAF Series-High Accuracy housings to precisely direct ±50 SCCM to ±750 SCCM 10 SlpM to 300 SlpM and control the airflow across the element. The mechanical Signal conditioning amplified, compensated amplified, compensated package design allows easy Technology silicon die with thermally isolated heater silicon die with thermally isolated heater mounting to circuit boards, 0 SLPM to 10 SLPM 0 SCCM to ±50 SCCM plus other advantages: 0 to SLPM to 15 SLPM 0 SCCM to ±100 SCCM amplified or un-amplified 0 SCCM to ±200 SCCM 0 to SLPM to 20 SLPM Flow/pressure range 0 to SLPM to 50 SLPM microbridge airflow; state-of- 0 SCCM to ±400 SCCM 0 to SLPM to 100 SLPM the-art silicon micromachining; 0 SCCM to ±750 SCCM 0 to SLPM to 200 SLPM sensitivity to low flows (30 0 to SLPM to 300 SLPM SCCM to 300 SLPM); accurate 10 SLPM to 200 SLPM: 4.0% reading Total error band as low as ±0.25 %FSS low pressure sensing 300 SLPM: 7.0% reading 0.003 mbar to 10 mbar Output analog (Vdc), digital (I2C) digital (I2C) (0.0001 in H0 to 4.0 in H0); 2 2 3.3 Vdc: 40 mW typ. (no load) (analog) analog or digital output. 23 mW typ. (no load) (digital) 3 Vdc: 60 mW max. Power consumption 5.0 Vdc: 55 mW typ. (no load) (analog) 10 Vdc: 200 mW max. Honeywell S&C airflow sensors 38 mW typ. (no load) (digital) offer enhanced performance in long port fastener mount, short port manifold mount, 22 mm OD tapered male multiple potential applications, Port style fastener mount, short port snap mount fitting, G 3/8 female threaded fitting including HVAC system Media capability non-corrosive dry gases non-corrosive dry gases damper control, gas analysis, Compensated temperature 0 °C to 50 °C 0 °C to 50 °C leak detection equipment, gas range [32 °F to 122 °F] [32 °F to 122 °F] metering and chromatography, Operating temperature -20 °C to 70 °C -20 °C to 70 °C process control, and vent range [-4 °F to 158 °F] [-4 °F to 158 °F] hoods. In the medical industry, potential applications range from respiratory equipment such as respirators, spirometers, anesthesia and oxygen delivery to sleep apnea equipment. 2 sensing.honeywell.com

Airflow Sensors AwM1000 Series AwM2000 Series AwM3000 Series AwM5000 Series Signal conditioning unamplified, compensated unamplified, compensated amplified amplified Technology silicon die silicon die silicon die silicon die 30 SCCM, 200 SCCM, 1000 SCCM ±200 SCCM 0 mbar to 1.25 mbar [0 in H0 to 0 SLPM to 5,0 SLPM ±30 SCCM 2 1000 SCCM to -600 SCCM 0.5 in H0] 0 SLPM to 10.0 SLPM Flow/pressure range ±1000 SCCM 2 ±5.0 mbar [2.0 in H0] 0 mbar to 5.0 mbar [0 in H0 to 0 SLPM to 15.0 SLPM 2 ±10.0 mbar [4.0 in H0] 2 ±10.0 mbar [4.0 in H0] 2 2 in H0] 0 SLPM to 20.0 SLPM 2 2 5.0 mbar [2.0 in H0] 2 Output analog analog analog analog Power consumption 30 mW typ. 30 mW typ. 50 mW or 100 mW typ. 100 mW max. Port style straight straight straight 1/4 in-18 NPT Media capability non-corrosive dry gases non-corrosive dry gases non-corrosive dry gases non-corrosive dry gases Compensated temperature -25 °C to 85 °C -25 °C to 85 °C -25 °C to 85 °C 0 °C to 50 °C range [-13 °F to 185 °F] [-13 °F to 185 °F] [-13 °F to 185 °F] [32 °F to 122 °F] Operating temperature -25 °C to 85 °C -25 °C to 85 °C -25 °C to 85 °C -20 °C to 70 °C range [-13 °F to 185 °F] [-13 °F to 185 °F] [-13 °F to 185 °F] [-4 °F to 158 °F sensing.honeywell.com 3

Airflow Sensors line Guide Airflow Sensors AwM700 Series AwM40000 Series AwM90000 Series Signal conditioning amplified unamplified (compensated) or amplified uncompensated Technology silicon die silicon die silicon die ±25.0 SCCM ±200 SCCM Flow/pressure range 300 SLPM 1.0 SLPM, 6.0 SLPM ±5.0 mbar [2.0 in H0] 2 Output analog analog analog Power consumption 60 mW max. 60 mW max., 75 mW max. 50 mW typ. Port style 22 mm tapered manifold parallel Media capability non-corrosive dry gases non-corrosive dry gases non-corrosive dry gases Compensated temperature 10 °C to 40 °C -25 °C to 85 °C N/A range [50 °F to 104 °F] [-13 °F to 185 °F] -40 °C to 125 °C Operating temperature -25 °C to 85 °C -25 °C to 85 °C [-40 °F to 251 °F] range [-13 °F to 185 °F] [-13 °F to 185 °F] (inclusive) 4 sensing.honeywell.com

spirometers, ventilators, and laparoscopy, in the system. ASIC-based I2C digital amplifier circuitry provides output gain as well as industrial air-to-fuel ratio, output simplifies integration to and/or introduces voltage offsets to sensor analytical instrumentation (spectrometry, microprocessors or microcontrollers, output. chromatography), fuel cells, gas leak reducing PCB complexity and detection, VAV system on HVAC systems, component count. Factory or custom AwM3000 Series. gas meters, and HVAC filters. calibration for multiple gas types Features: Precision silicon eliminates need to implement gas micromachining • Sensitivity to low flows HonEywEll ZEpHyR™ AiRFlow correction factors. RoHS-compliant (30 SCCM to 1000 SCCM) • Enhanced SEnSoRS materials meet Directive 2002/95/ response time • Low power consumption HAF Series-High Accuracy. EC. Designed for use in medical • Analog output • Cost effective • Laser 10 SlpM to 300 SlpM equipment such as anesthesia delivery trimmed • Amplified • Mass flow and low Features: Industry’s smallest Total Error machines, ventilators, ventricular assist differential pressure sensing • Sensor to Band • High accuracy • Fast response devices (heart pumps), spirometers, sensor interchangeability time • High stability • High sensitivity at laparoscopy, as well as industrial Benefits: Amplified signal conditioning very low flows • High 12 bit resolution analytical instrumentation (spectrometry, increases gain and introduces voltage • Industry’s widest airflow range • Choice chromatography) air-to-fuel ratio, fuel offsets to sensor output. On-board heater or port styles • Linear output • Wide cells, fume hoods, gas leak detection, control circuit. Laser trimmed for improved supply voltage range • ASIC-based process control gas monitoring, and sensor interchangeability. Potential I2C digital output • Factory or custom vacuum pump monitoring. applications include HVAC damper calibration for mulitple gas types • RoHS- control, process control, respirators, leak compliant materials AwM1000 Series. detection equipment, gas metering, and Features: Precision silicon chromatography. Benefits: Industry’s smallest Total Error micromachining • Sensitivity to low flows Band (TEB) allows for precise airflow (200 SCCM to 1000 SCCM) • Enhanced AwM5000 Series. measurement. High accuracy ideal for response time • Low power consumption Features: Precision silicon use in demanding applications. Fast • Analog output • Cost-effective • Bi- micromachining • Sensitivity to low response time allows the customer’s directional sensing capability • Sensor to flows (5 SLPM to 20 SLPM) • Enhanced application to respond quickly to airflow sensor interchangeability • Unamplified response time • Low power consumption change, important in critical medical • Laser trimmed • Mass flow and low • Analog output • Cost-effective • On- and industrial applications. High stability differential pressure sensing board signal conditioning • Venturi reduces errors due to thermal effects and Benefits: Cost-effective microbridge type flow housing • Remote mounting null shift to provide accurate readings over technology for potential applications capability • Laser trimmed • AMP- time and often eliminating the need for including HVAC damper control, process compatible connector • Rugged plastic system calibration after PCB mount and control, respirators, oxygen concentrators, package • Amplified • Mass flow pressure periodically over time. High sensitivity at gas metering, and chromatography. sensing • Sensor to sensor very low flows provides a fast response Differential amplifier circuitry provides interchangeability time at the onet of cessation of flow. High output gain and/or introduces voltage 12-bit resolution increases the ability to offsets to sensor output. Benefits: Performs amplification, sense small airflow changes, allowing linearization, temperature compensation, customers to more precisely control their AwM2000 Series. and gas calibration. Separate gas application. Wide airflow range measures Features: Precision silicon calibration types (nitrogen, carbon mass flow with standard flow ranges micromachining • Sensitivity to low flows dioxide, nitrous oxide or argon). of 10 SLPM to 300 SLPM, or custom (30 SCCM to 1000 SCCM) • Enhanced Microbridge chip in direct contact with flow ranges, increasing the options for response time • Low power consumption flow stream reduces error due to orifice integrating the sensor into the application • Analog output • Cost-effective or bypass channel clogging. In-line flow Choice of port styles provide flexibility to • Bi-directional sensing capability measurement potential applications choose the pneumatic connection that is • Unamplified • Laser trimmed • Sensor to including HVAC damper control, oxygen best for the customer’s application. Linear sensor interchangeability • Mass flow and concentrators, leak detection equipment, output provides a more intuitive sensor low differential pressure sensing gas metering, and chromatography. 1 Vdc signal than the raw output of basic airflow to 5 Vdc linear output possible regardless sensors, which can help reduce Benefits: Cost-effective microbridge of flow range or calibration gas. Active production costs, design, and technology for potential applications laser trimming improves interchangeability. implementation time. Wide supply voltage including process control, respirators, AMP-compatible connector often provides range gives the designer the flexibility to ventilators, oxygen concentrators, and reliable connection in demanding choose the supply voltage that works best leak detection equipment. Differential applications. sensing.honeywell.com 5

AwM700 Series. chromatography. Low power consumption warranty. Honeywell warrants goods of Features: Precision silicon for portable devices and battery-powered its manufacture as being free of defective micromachining • Sensitivity to low flows applications. Laser-trimmed thick-film and materials and faulty workmanship. (200 SLPM to 300 SLPM) • Enhanced thin-film resistors designed to provide Honeywell’s standard product warranty response time • Low power consumption consistent interchangeability from one applies unless agreed to otherwise by • Analog output • Cost-effective • High device to the next. Honeywell in writing; please refer to your flow range capability in a small package order acknowledgement or consult your • Highly stable null and full-scale AwM90000 Series. local sales office for specific warranty • Compact package design • Extremely Features: Precision silicon details. If warranted goods are returned to low hysteresis and repeatability errors micromachining • Sensitivity to low flows Honeywell during the period of coverage, • AMP-compatible connector (200 SCCM) • Low power consumption Honeywell will repair or replace, at its • Amplified • Mass flow and differential • Analog output • Cost-effective • Bi- option, without charge those items it finds pressure sensing • Sensor to sensor directional sensing capability • Enhanced defective. The foregoing is buyer’s sole interchangeability response time • Uncompensated • Mass remedy and is in lieu of all warranties, flow and differential pressure sensing expressed or implied, including those Benefits: Performs amplification and of merchantability and fitness for a temperature compensation. Specially Benefits: Proven thermal bridge particular purpose. in no event shall designed bypass flow housing provides technology. Two versions available, mass Honeywell be liable for consequential, in-line flow measurement. Provides flow and differential pressure. Potential special, or indirect damages. enhanced reliability, accuracy, and applications includie HVAC damper precision operating characteristics control, process control, respirators, While we provide application assistance for use in potential medical ventilation ventilators, oxygen concentrators, leak personally, through our literature and equipment and medical and analytical detection equipment, gas metering, and the Honeywell web site, it is up to the instrumentation applications. Low power chromatography. Low power consumption customer to determine the suitability of the consumption for portable devices and for portable devices and battery-powered product in the application. battery-powered applications. Enhanced applications. accuracy over life reduces need for Specifications may change without notice. recalibration. Snap-in AMP-compatible The information we supply is believed to connector provides reliable connection. be accurate and reliable as of this printing. However, we assume no responsibility for AwM40000 Series. its use. Features: Precision silicon micromachining • Sensitivity to low For more information about Sensing and flows (25 SCCM to 6 SLPM) • Enhanced Control products, visit sensing.honeywell. response time • Low power consumption com or call +1-815-235-6847. • Analog output • Cost-effective Email inquiries to info.sc@honeywell.com • Repeatable response • Laser trimmed • Standard mounting centers • Amplified and unamplified • Mass flow pressure sensing • Sensor to sensor interchangeability Benefits: Sensitive to low flows, adaptable for use with higher flows for potential applications including process control, respirators, ventilators, oxygen concentrators, gas metering, and Sensing and Control Automation and Control Solutions Honeywell 1985 Douglas Drive North Golden Valley, MN 55422 USA 008150-7-EN +1-815-235-6847 January 2014 honeywell.com Copyright © 2014 Honeywell International Inc. All rights reserved.