Airflow Sensors AWM5000 Series High Flow Mass Airflow/Amplified FEATURES (cid:49) Linear voltage output (cid:49) Venturi design (cid:49) Remote mounting capability (cid:49) Active laser trimming improves inter- change ability (cid:49) Separate gas calibration types: – Ar (argon) – N (nitrogen) or 2 – CO (carbon dioxide) 2 In-Line Flow Measurement AWM5000 Series Microbridge Mass Air- flow Sensors feature a venturi type flow housing. They measure flow as high as 20 Figure 1 standard liters per minute (SLPM) while inducing a maximum pressure drop of 2.25(cid:78)HO. The microbridge chip is in di- 2 rect contact with the flow stream, greatly reducing error possibilities due to orifice or bypass channel clogging. Rugged, Versatile Package The rugged plastic package has been designed to withstand common mode pressures up to 50 psi, and the small sensing element allows 100 gs of shock without compromising performance. The included ‘‘AMP’’ compatible connector provides reliable connection in demand- ing applications. On-board Signal Conditioning Each AWM5000 sensor contains circuitry Figure 2 which performs amplification, lineariza- tion, temperature compensation, and gas A calibration. Figure 1(Heater Control Cir- ir f cuit) and Figure 2 (Sensor Bridge Circuit lo and Amplification Linearization Circuit) il- w lustrate the on-board electrical circuitry for the AWM5000 Series. A 1 to 5 VDC linear output is possible for all listings regardless of flow range (5, 10, 15, or 20 SLPM) or calibration gas (nitrogen, car- bon dioxide, nitrous oxide, or argon). All calibration is performed by active laser trimming. Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada 79

Airflow Sensors AWM5000 Series Highflow Mass Airflow/Amplified SPECIFICATIONS (Performance Characteristics @10.0 ±0.01VDC, 25(cid:176) C) AWM5101 AWM5102 AWM5103 AWM5104 Flow Range (Note 3) 0-5 SLPM 0-10 SLPM 0-15 SLPM 0-20 SLPM Suffix - Calibration gas VA- Argon (Ar) VC- Carbon dioxide (CO) VN- Nitrogen (N) 2 2 Min. Typ. Max. Excitation VDC 8 10±0.01 15 Power consumption (mW) — — 100 Response time (msec) — — 60 Null output VDC 0.95 1 1.05 Null output shift −20(cid:176) to 70(cid:176) C — ±0.050 VDC ±.200 VDC Common Mode Pressure (psi) — — 50 Temperature range −20(cid:176) to +70(cid:176) C, (−4(cid:176) to 158(cid:176) F) Weight 60 grams (2.12 oz.) Shock ratings 100 g peak, 6 msec half-sine (3 drops, each direction of 3 axes) Output @ laser trim point 5 VDC @ Full Scale Flow Output voltage shift +20(cid:176) to −25(cid:176) C, +20(cid:176) to 70(cid:176) C Suffix VA or VN ±7.0% Reading, Suffix VC ±10.0% Reading Linearity error (2) ±3.0% Reading (max.) Repeatability & Hysteresis ±0.5% Reading (max.) Connector (Included) —Four pin receptacle MICRO SWITCH (SS12143)/AMP (103956-3) Leak rate, max 0.1 psi/min. at static condition, (Note 2) Notes: 1. Linearity specification applies from 2 to 100% full scale of gas flow range, and does not apply to null output at 0 SLPM. 2. The AWM5000 series product has a leakage spec of less than 0.1psi per minute at 50 psi common mode pressure. If during installation, the end adapters are twisted with respect to the flowtube, this may compromise the seal between the o-ring and the flowtube and may cause a temporary leak. This leak might be as high as 1psi or might remain in specification. It will self-reseal as the o-ring takes a new set. Approximately 85% of the leakage will dissipate in 24 hours. Within 48 hours, complete recovery will take place. 3. SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0(cid:176) C/1bar (sea level), 50% RH. NOTICE AWM5000—Chimney Effect AWM microbridge mass airflow sensors detect mass airflow caused by heat transfer. The thermally isolated microbridge structure consists of a heater resistor positioned between two temperature sensing resistors. The heater resistor maintains a constant temperature, 160(cid:176) C above ambient, during sensor operation. Airflow moving past the chip transfers heat from the heater resistor. This airflow warms the downstream resistor and cools the upstream resistor. The temperature change and the resulting change in resistance of the temperature resistors is proportional to the mass airflow across the sensing element. When the sensor is mounted in a vertical position, under zero flow conditions, the sensor may produce an output that is the result of thermally induced convection current. This occurrence is measurable in the AWM5000 Series, particularly in the 5 SLPM versions. When designing the sensor into applications where null stability is critical, avoid mounting the sensor in a vertical position. 80 Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada

Airflow Sensors AWM5000 Series High Flow Mass Airflow/Amplified OUTPUT CURVES (Performance Characteristics @10.0 ±0.01VDC, 25(cid:176) C) A ir f lo w Honeywell(cid:49)Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada 81

Airflow Sensors AWM5000 Series Highflow Mass Airflow/Amplified AWM5000 ORDER GUIDE Catalog Listing Flow Range AWM5101VA 5 SLPM, Argon calibration AWM5101VC 5 SLPM, CO calibration (2) 2 AWM5101VN 5 SLPM, N calibration (1) 2 AWM5102VA 10 SLPM, Argon calibration AWM5102VC 10 SLPM, CO calibration (2) 2 AWM5102VN 10 SLPM, N calibration (1) 2 AWM5103VA 15 SLPM, Argon calibration AWM5103VC 15 SLPM, CO calibration (2) 2 AWM5103VN 15 SLPM, N calibration (1) 2 AWM5104VA 20 SLPM, Argon calibration AWM5104VC 20 SLPM, CO calibration (2) 2 AWM5104VN 20 SLPM, N calibration (1) 2 CONNECTOR ORDER GUIDE Catalog Listing Description SS12143 Four pin Electrical connector Connectors use Amp 103956-3 Note: All listings have 1- 5 VDC linear output with 10 VDC supply over given flow range for a specific calibration gas. 1.N calibration is identical to 0 and air calibration. 2 2 2.CO calibration is identical to NO calibration. 2 2 3.For additional gas correction factors, see Application Note 3. OUTPUT CONNECTIONS Pin 1 +Supply voltage Pin 2 Ground Pin 3 No connection Pin 4 Output voltage Arrow on bottom of housing indicates direction of flow. MOUNTING DIMENSIONS (for reference only) 82 Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada