Airflow Sensors AWM3000 Series Microbridge Mass Airflow/Amplified Figure 1 Heater control circuit FEATURES (cid:49) Laser trimmed for improved sensor interchangeability (cid:49) Flow sensing up to 1.0 SLPM (cid:49) Low differential pressure sensing Like the AWM2000 Series, the dual Wheatstone bridges control airflow mea- surement. The AWM3000 Series is ampli- fied; therefore, it can be used to increase the gain and to introduce voltage offsets Figure 2 to the sensor output. The schematic in Sensing bridge supply circuit Figure 3 depicts the amplification circuitry on board the sensor. Also, the heater con- trol circuit (see Figure 1) and the sensing bridge supply circuit (see Figure 2) are on board the package. A ir f lo w Figure 3 Differential instrumentation amplifier circuit Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada 71

Airflow Sensors AWM3000 Series Microbridge Mass Airflow/Amplified AWM3000 SERIES ORDER GUIDE (Performance Characteristics @10.01±0.01VDC, 25(cid:176) C) Catalog Listings AWM3100V AWM3150V AWM3200V AWM3300V Flow Range (Full Scale) +200 sccm +30 sccm +1000 sccm Pressure Range (See Application Note 1) +2.0(cid:78)HO (5 mBar) 2 Output Voltage @ Trim Point 5 VDC @ 200 sccm 3.4 VDC @ 25 sccm 5 VDC @ 2(cid:78)HO 5 VDC @ 1000 sccm 2 Null Voltage 1.00 ±0.05 VDC 1.00 ±0.10 VDC 1.00 ±0.08 VDC 1.00 ±0.10 VDC Null Voltage Shift, Typ. +25(cid:176) to −25(cid:176) C, 25(cid:176) to +85(cid:176) C ±25 mV ±100 mV ±25 mV ±25 mV Output Voltage Shift, Max. +25(cid:176) to −25(cid:176) C −4% Reading ±5% Reading +24% Reading (Note 3) −5% Reading +25(cid:176) to +85(cid:176) C +4% Reading ±5% Reading −24% Reading +5% Reading Repeatability & Hysteresis, Max. ±0.50% Reading ±1% Reading ±0.50% Reading ±1% Reading Min. Typ. Max. Excitation VDC (Note 2) 8.0 10±0.01 15 Power Consumption (mW) — 50 60 Response Time (msec) (Note 1) — 1.0 3.0 Common Mode Pressure (psi) — — 25 Temperature Range Operating: −25(cid:176) to +85(cid:176) C (−13(cid:176) to +185(cid:176) F); Storage: −40(cid:176) to +90(cid:176) C (−40(cid:176) to +194(cid:176) F) Termination 2,54 mm (.100(cid:78)) centers, 0,635 mm (0.025(cid:78)) square Weight (grams) 10.8 Shock Rating 100 g peak (5 drops, 6 axes) Notes: 1. Initial warm-up time for signal conditioned circuitry is 1minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. (See Application Note 1.) 4. Maximum allowable rate of flow change to prevent damage: 5 SLPM/1sec. MOUNTING DIMENSIONS (for reference only) Note: Positive flow direction is defined as proceeding from Port 1(P1) to Port 2 (P2) and results in positive output. Do not exert a force greater than 4.54kg (10 lbs.) in any direction. 72 Honeywell(cid:49)Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada

Airflow Sensors AWM3000 Series Microbridge Mass Airflow/Amplified OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01VDC, 25 C AWM3100V AWM3150V AWM3200V (Note 2) AWM3300V Press.Flow Nom. Tol. Press Flow Nom. Tol. Flow Press Nom. Tol. Press.Flow Nom. Tol. mBar sccm VDC ±VDC mBar sccm VDC ±VDC sccm (cid:78)HO VDC ±VDC mBar sccm VDC ±VDC 2 0.49 200 5.00 0.15 2.50 30 3.75 0.70 60.0 2.00 5.00 0.15 3.40 1000 5.00 0.15 0.42 175 4.80 0.16 1.70 20 2.90 0.45 53.0 1.75 4.59 0.15 2.90 900 4.90 0.16 0.35 150 4.50 0.17 0.84 10 1.95 0.20 46.0 1.50 4.16 0.16 2.40 800 4.80 0.17 0.28 125 4.17 0.18 0.42 5 1.50 0.10 38.0 1.25 3.70 0.20 2.00 700 4.66 0.18 0.21 100 3.75 0.19 0.34 4 1.40 0.08 30.0 1.00 3.25 0.22 1.60 600 4.42 0.19 0.14 75 3.27 0.19 0.26 3 1.30 0.08 23.0 0.75 2.65 0.22 1.20 500 4.18 0.20 0.09 50 2.67 0.17 0.17 2 1.20 0.07 16.0 0.50 2.15 0.19 0.80 400 3.82 0.21 0.04 20 1.90 0.13 0.08 1 1.10 0.06 8.0 0.25 1.55 0.11 0.54 300 3.41 0.19 0.00 0 1.00 0.05 0.00 0 1.00 0.05 0.0 0.00 1.00 0.08 0.31 200 2.96 0.17 0.12 100 2.30 0.14 0.00 0 1.00 0.10 Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 2. Differential pressure calibrated devices are not recommended for flow measurement. Use flow calibrated devices for flow measurement. OUTPUT CURVES A ir f lo w Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada 73

Airflow Sensors AWM3000 Series Microbridge Mass Airflow/Amplified AWM3000 SERIES ORDER GUIDE (Performance Characteristics @ 10.01±0.01VDC, 25(cid:176) C) Catalog Listings AWM3200CR* AWM3201CR* AWM3303V Flow Range (Full Scale) ±1000 sccm (1 SLPM) Differential Pressure Range 0 - 2(cid:78)HO (5 mBar) 0 - 0.5(cid:78)HO (1.25 mBar) 2 2 Output Type 4 - 20 mA DC (linear) 4 - 20 mA DC (linear) 1 - 5 VDC (Note 2) Output @ Trim Point 20.0 ±1 mA DC @ 2(cid:78)HO 20.0 ±1 mA DC @ .05(cid:78)HO 5.00 ±0.150 VDC 2 2 Null Output 4.00 ±0.3 mA DC 4.00 ±0.4 mA DC 3.00 ±0.050 VDC Null Shift +25(cid:176) to −25(cid:176) C, +25(cid:176) to +85(cid:176) C ±2 mA DC (max.) ±2 mA DC (max.) ±.050 VDC (max.) Output Shift +25(cid:176) to −25(cid:176) C +24% Reading +32% Reading −5% Reading +25(cid:176) to +85(cid:176) C −31% Reading (Note 3) −32% Reading (Note 3) +5% Reading Linearity Error ±5% Reading ±5% Reading N/A External Output Load 100 - 300 Ω(Note 4) 100 - 300 Ω(Note 4) N/A Response Time (Note 1) 60 msec (max.) 60 msec (max.) 3 msec (max.) Repeatability & Hysteresis, Max. ±0.50% Reading ±0.50% Reading ±1% Reading Excitation VDC 10 ±0.01 10±0.01 8-15 Power Consumption (mW) — 50 100 Common Mode Pressure (psi) — — 25 Calibration Gas Nitrogen Temperature Range Operating: −25(cid:176) to +85(cid:176) C (−13(cid:176) to +185(cid:176) F); Storage: −40(cid:176) to +90(cid:176) C (−40(cid:176) to +194(cid:176) F) Termination 2,54 mm (.100(cid:78)) centers, 0,635 mm (0.025(cid:78)) square Weight (grams) 10.8 Shock Rating 100 g peak (5 drops, 6 axes) Notes: 1. Initial warm-up time for signal conditioned circuitry is 1minute max. 2. Output Voltage is ratiometric to supply voltage. 3. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature. 4. Output load connected from V to GND (current sinking). OUT 5. Maximum allowable rate of flow change to prevent damage: 5.0 SLPM/1.0 sec. * A 5 micron filter must be used on differential pressure sensors. MOUNTING DIMENSIONS (for reference only) Note: Positive flow direction is defined as proceeding from Port 1(P1) to Port 2 (P2) and results in positive output. Do not exert a force greater than 4.54kg (10 lbs.) in any direction. 74 Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada

Airflow Sensors AWM3000 Series Microbridge Mass Airflow/Amplified OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01VDC, 25 C AWM3200CR (Note 2) AWM3201CR (Note 2) AWM3303V Flow Press. Nom. Tol. Flow Press. Nom. Tol. Press Flow Nom. Tol. sccm (cid:78)HO mA DC ±mA DC sccm (cid:78)HO mA DC ±mA DC mBar sccm VDC ±VDC 2 2 0 0.00 4.00 0.3 0 0.00 4.0 0.4 3.49 1000 5.00 0.15 7 0.25 5.75 0.3 35 0.10 7.2 0.4 2.42 800 4.82 0.18 15 0.50 7.70 0.4 42 0.13 8.0 0.4 1.59 650 4.67 0.20 22 0.75 9.75 0.4 53 0.17 9.4 0.5 0.83 400 4.42 0.20 25 0.81 10.21 0.5 61 0.20 10.4 0.5 0.31 200 3.96 0.15 30 1.00 12.00 0.6 71 0.25 12.0 0.6 0.00 0 3.00 0.05 37 1.25 13.90 0.7 81 0.30 13.6 0.7 -0.31 -200 2.03 0.18 45 1.50 16.00 0.8 87 0.35 15.2 0.8 -0.83 -400 1.62 0.20 52 1.75 18.00 0.8 97 0.40 16.8 0.9 -1.59 -600 1.35 0.25 55 1.83 18.50 0.9 105 0.45 18.4 1.0 -2.42 -800 1.15 0.30 60 2.00 20.00 1.0 113 0.50 20.0 1.0 -3.44 -1000 1.00 0.35 Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 2. Differential pressure calibrated devices are not recommended for flow measurement. Use flow calibrated devices for flow measurement. OUTPUT CURVES A ir f lo w Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada 75

Mouser Electronics Authorized Distributor Click to View Pricing, Inventory, Delivery & Lifecycle Information: H oneywell: AWM3100V AWM3130V AWM3150V AWM3200CR AWM3200V AWM3201CR AWM3205V AWM3300V AWM3303V