Vibration Rejecting ±250°/s Yaw Rate Gyroscope Data Sheet ADXRS642 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip The ADXRS642 is a complete angular rate sensor (gyroscope) Z-axis (yaw rate) response that uses the Analog Devices, Inc., surface-micromachining 20°/hour bias stability process to make a functionally complete and low cost angular rate 0.02°/√second angle random walk sensor integrated with all of the required electronics on one chip. High vibration rejection over a wide frequency The manufacturing technique for this device is a patented high 10,000 g powered shock survivability volume BiMOS process with years of proven field reliability. Ratiometric to referenced supply The ADXRS642 is an industrial grade gyroscope that is 100% 5 V single supply operation pin, package, temperature, and function compatible with the −40°C to +105°C operation ADXRS622 and ADXRS652, while offering enhanced vibration Self-test on digital command rejection Ultrasmall and light (<0.15 cc, <0.5 gram) Temperature sensor output The output signal, RATEOUT (1B, 2A), is a voltage propor- RoHS compliant tional to angular rate about the axis normal to the top surface of the package. The measurement range is a minimum of APPLICATIONS ±250°/s. The output is ratiometric with respect to a provided reference supply. Other external capacitors are required for Industrial applications operation. Inertial measurement units Severe mechanical environments A temperature output is provided for compensation techniques. Platform stabilization Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal condi- tioning circuits. The ADXRS642 is available in a 7 mm × 7 mm × 3 mm BGA chip-scale package. FUNCTIONAL BLOCK DIAGRAM 3V TO 5V (ADC REF) 100nF 5V AVCC ST2 ST1 TEMP VRATIO ADXRS642 100nF SELF-TEST 25kΩ 25kΩ @ 25°C AGND DEMOD DARMIVPE MESCEHNASNOICRAL AAMCP VGA 5V 180kΩ ±1% VDD CHARGE PUMP AND VOLTAGE 100nF REGULATOR PGND CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT 22nF 22nF 100nF COUT 09770-001 Figure 1. Rev. A Document Feedback Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Tel: 781.329.4700 ©2011–2012 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. Technical Support www.analog.com

ADXRS642 Data Sheet TABLE OF CONTENTS Features .............................................................................................. 1 Theory of Operation .........................................................................8 Applications ....................................................................................... 1 Setting Bandwidth .........................................................................8 General Description ......................................................................... 1 Temperature Output and Calibration .........................................8 Functional Block Diagram .............................................................. 1 Supply Ratiometricity ...................................................................8 Revision History ............................................................................... 2 Modifying the Measurement Range ...........................................9 Specifications ..................................................................................... 3 Null Adjustment ............................................................................9 Absolute Maximum Ratings ............................................................ 4 Self-Test Function .........................................................................9 Rate Sensitive Axis ....................................................................... 4 Continuous Self-Test .....................................................................9 ESD Caution .................................................................................. 4 Mechanical Performance ..............................................................9 Pin Configuration and Function Descriptions ............................. 5 Outline Dimensions ....................................................................... 10 Typical Performance Characteristics ............................................. 6 Ordering Guide .......................................................................... 10 REVISION HISTORY 10/12—Rev. 0 to Rev. A Changes to Figure 1 .......................................................................... 1 Changes to Figure 10 ........................................................................ 7 Updated Outline Dimensions ....................................................... 10 4/11—Revision 0: Initial Version Rev. A | Page 2 of 12

Data Sheet ADXRS642 SPECIFICATIONS All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. T = 25°C, V = AV = V = 5 V, A S CC DD V = AV , angular rate = 0°/sec, bandwidth = 80 Hz (C = 0.01 µF), I = 100 µA, ±1 g, unless otherwise noted. RATIO CC OUT OUT Table 1. Parameter Conditions Min Typ Max Unit SENSITIVITY1 Clockwise rotation is positive output Measurement Range2 Full-scale range over specifications range ±250 ±300 °/sec Initial and Over Temperature −40°C to +105°C 7.0 mV/°/sec Temperature Drift3 ±2 % Nonlinearity Best fit straight line 0.01 % of FS NULL1 Null −40°C to +105°C 2.5 V Calibrated Null4 −40°C to +105°C ±0.1 °/sec Temperature Drift −40°C to +105°C ±1 °/sec Linear Acceleration Effect Any axis 0.03 °/sec/g Vibration Rectification 25 g rms, 50 Hz to 5 kHz 0.0002 °/s/g2 NOISE PERFORMANCE Rate Noise Density T ≤ 25°C 0.02 °/sec/√Hz A Resolution Floor T = 25°C 1 minute to 1 hour in-run 20 °/hr A FREQUENCY RESPONSE Bandwidth5 +3 dB user adjustable up to specification 2000 Hz Sensor Resonant Frequency 15 17 19 kHz SELF-TEST1 ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 −45 °/sec ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 45 °/sec ST1 to ST2 Mismatch6 −5 ±2 +5 % Logic 1 Input Voltage 3.3 V Logic 0 Input Voltage 1.7 V Input Impedance To common 40 50 100 kΩ TEMPERATURE SENSOR1 V at 25°C Load = 10 MΩ 2.35 2.5 2.65 V OUT Scale Factor7 25°C, V = 5 V 9 mV/°C RATIO Load to V 25 kΩ S Load to Common 25 kΩ TURN-ON TIME4 Power on to ±0.5°/sec of final with CP5 = 100 nF 50 ms OUTPUT DRIVE CAPABILITY Current Drive For rated specifications 200 µA Capacitive Load Drive 1000 pF POWER SUPPLY Operating Voltage (V) 4.75 5.00 5.25 V S Quiescent Supply Current 3.5 4.5 mA TEMPERATURE RANGE Specified Performance −40 +105 °C 1 Parameter is linearly ratiometric with V . RATIO 2 Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. 3 From +25°C to −40°C or +25°C to +105°C. 4 Based on characterization. 5 Adjusted by external capacitor, C . Reducing bandwidth below 0.01 Hz does not result in further noise improvement. OUT 6 Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2). 7 Scale factor for a change in temperature from 25°C to 26°C. V is ratiometric to V . See the Temperature Output and Calibration section for more information. TEMP RATIO Rev. A | Page 3 of 12

ADXRS642 Data Sheet ABSOLUTE MAXIMUM RATINGS RATE SENSITIVE AXIS Table 2. Parameter Rating This is a z-axis rate-sensing device (also called a yaw rate- Acceleration (Any Axis, 0.5 ms) sensing device). It produces a positive going output voltage Unpowered 10,000 g for clockwise rotation about the axis normal to the package Powered 10,000 g top, that is, clockwise when looking down at the package lid. V , AV −0.3 V to +6.0 V DD CC V AV RATIO CC RATE ST1, ST2 AVCC AXIS RATE OUT Output Short-Circuit Duration Indefinite VCC = 5V (Any Pin to Common) LONGITUDINAL 4.75V Operating Temperature Range −55°C to +125°C AXIS + 7 VRATIO/2 Storage Temperature Range −65°C to +150°C RATE IN SRtarteisnsgess mabaoyv cea tuhsoes pe elirsmteadn uenntd dera mthaeg Ae btoso tlhuet ed Mevaicxeim. Tuhmis is a A1 LAATBECRADLE AFXGIS1 GND 0.25V 09770-002 stress rating only; functional operation of the device at these or Figure 2. RATEOUT Signal Increases with Clockwise Rotation any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect ESD CAUTION device reliability. Drops onto hard surfaces can cause shocks of greater than 10,000 g and can exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage. Rev. A | Page 4 of 12

Data Sheet ADXRS642 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS PGND VDD CP5 CP3 CP4 7 6 ST1 CP1 5 ST2 CP2 4 TEMP AVCC 3 2 1 AGND G F VRAETIO NDC SUCMJ B A RATEOUT 09770-004 Figure 3. Pin Configuration Table 3. Pin Function Descriptions Pin No. Mnemonic Description 6D, 7D CP5 HV Filter Capacitor, 100 nF. 6A, 7B CP4 Charge Pump Capacitor, 22 nF. 6C, 7C CP3 Charge Pump Capacitor, 22 nF. 5A, 5B CP1 Charge Pump Capacitor, 22 nF. 4A, 4B CP2 Charge Pump Capacitor, 22 nF. 3A, 3B AV Positive Analog Supply. CC 1B, 2A RATEOUT Rate Signal Output. 1C, 2C SUMJ Output Amp Summing Junction. 1D, 2D NC No Connection. Do not connect to these pins. 1E, 2E V Reference Supply for Ratiometric Output. RATIO 1F, 2G AGND Analog Supply Return. 3F, 3G TEMP Temperature Voltage Output. 4F, 4G ST2 Self-Test for Sensor 2. 5F, 5G ST1 Self-Test for Sensor 1. 6G, 7F PGND Charge Pump Supply Return. 6E, 7E V Positive Charge Pump Supply. DD Rev. A | Page 5 of 12

ADXRS642 Data Sheet TYPICAL PERFORMANCE CHARACTERISTICS 60 50 45 %) 50 %) N ( N ( 40 O O TI TI 35 A 40 A L L U U P P 30 O O P P F 30 F 25 O O GE GE 20 A A T 20 T N N 15 E E C C PER 10 PER 10 5 0 0 2.20 2.25 2.30 2.35 2.40N2U.4L5L 2B.5I0AS2 .(5V5)2.60 2.65 2.70 2.75 2.80 09770-005 –4 –3 –2 –M1ISMAT0CH (%1) 2 3 4 09770-008 Figure 4. Null Bias at 25°C Figure 7. Self- Test Mismatch at 25°C (V = 5 V) RATIO 60 100 90 %) 50 %) N ( N ( 80 O O TI TI 70 A 40 A L L U U P P 60 O O P P F 30 F 50 O O E E G G 40 A A T 20 T N N 30 E E C C PER 10 PER 20 10 0 –600 –560 –520 –480 –44S0T1–4Δ0 (0m–V3)60 –320 –280 –240 –200 09770-006 0 2.36 2.38 2.40VTE2M.P4 2OUT2P.U44T (V)2.46 2.48 2.50 09770-009 Figure 5. ST1 Output Change at 25°C (VRATIO = 5 V) Figure 8. VTEMP Output at 25°C (VRATIO = 5 V) 60 100 90 %) 50 %) N ( N ( 80 O O PULATI 40 PULATI 6700 O O P P OF 30 OF 50 GE GE 40 A A T 20 T N N 30 E E C C ER ER 20 P 10 P 10 0 240 280 320 360 40S0T24Δ4 0(mV4)80 520 560 600 640 09770-007 0 0.0056 0.0060 0.0064 S0E.0N06S8ITI0V.0I0T7Y2 (m0.V00/°7/6s)0.0080 0.0084 0.0088 09770-010 Figure 6. ST2 Output Change at 25°C (V = 5 V) Figure 9. Sensitivity at 25°C RATIO Rev. A | Page 6 of 12

Data Sheet ADXRS642 1000 3.3 s) 3.1 m ur r 2.9 o H ON (°/ T (V) 2.7 VIATI 100 UTPU 2.5 E O N D MP 2.3 A E LL VT 2.1 A T O 1.9 O R 1.7 10 0.01 0.1 AVE1RAGING T10IME (Seco10n0ds) 1000 10000 09770-011 1.5–50 –25 0 TEMP2E5RATURE50 (°C) 75 100 09770-013 Figure 10. Typical Root Allan Deviation at 25°C vs. Averaging Time Figure 12. V Output over Temperature, 256 Parts (V = 5 V) TEMP RATIO 60 %) 50 N ( O TI A 40 L U P O P F 30 O E G A T 20 N E C R E P 10 0 3.20 3.25 3.30C3U.3R5RE3N.4T0 C3O.4N5S3U.M50PT3I.O55N (3m.6A0)3.65 3.70 3.75 09770-012 Figure 11. Current Consumption at 25°C (V = 5 V) RATIO Rev. A | Page 7 of 12

ADXRS642 Data Sheet THEORY OF OPERATION The ADXRS642 operates on the principle of a resonator gyro. SETTING BANDWIDTH Figure 13 shows a simplified version of one of four polysilicon The external capacitor, C , is used in combination with the OUT sensing structures. Each sensing structure contains a dither on-chip resistor, R , to create a low-pass filter to limit the OUT frame that is electrostatically driven to resonance. This produces bandwidth of the ADXRS642 rate response. The −3 dB the necessary velocity element to produce a Coriolis force when frequency set by R and C is experiencing angular rate. The ADXRS642 is designed to sense OUT OUT ( ) f =1/2×π×R ×C a z-axis (yaw) angular rate. OUT OUT OUT When the sensing structure is exposed to angular rate, the and can be well controlled because R has been trimmed OUT resulting Coriolis force couples into an outer sense frame, during manufacturing to be 180 kΩ ± 1%. Any external resistor which contains movable fingers that are placed between fixed applied between the RATEOUT pin (1B, 2A) and SUMJ pin pickoff fingers. This forms a capacitive pickoff structure that (1C, 2C) results in senses Coriolis motion. The resulting signal is fed to a series of R =(180kΩ×R )/(180kΩ+R ) OUT EXT EXT gain and demodulation stages that produce the electrical rate signal output. The quad sensor design rejects linear and angular In general, an additional filter (in either hardware or software) acceleration, including external g-forces and vibration. This is is added to attenuate high frequency noise arising from achieved by mechanically coupling the four sensing structures demodulation spikes at the 18 kHz resonant frequency of the such that external g-forces appear as common-mode signals gyro. An R/C output filter consisting of a 3.3k series resistor and that can be removed by the fully differential architecture 22 nF shunt capacitor (2.2 kHz pole) is recommended. Figure 13 implemented in the ADXRS642. shows the effect of adding this filter to the output of an ADXRS642 set to a 2000 Hz bandwidth. TEMPERATURE OUTPUT AND CALIBRATION It is common practice to temperature-calibrate gyros to improve their overall accuracy. The ADXRS642 has a temperature propor- tional voltage output that provides input to such a calibration method. The temperature sensor structure is shown in Figure 14. The temperature output is characteristically nonlinear, and any X load resistance connected to the TEMP output results in decreasing Y the TEMP output and its temperature coefficient. Therefore, Z buffering the output is recommended. The voltage at TEMP (3F, 3G) is nominally 2.5 V at 25°C, and V = 5 V. The temperature coefficient is ~9 mV/°C at 25°C. RATIO Although the TEMP output is highly repeatable, it has only modest absolute accuracy. VRATIO VTEMP 09770-016 RFIXED RTEMP 09770-003 Figure 13. Simplified Gyro Sensing Structure–One Corner Figure 14. Temperature Sensor Structure SUPPLY RATIOMETRICITY The electrostatic resonator requires 18 V to 20 V for operation. Because only 5 V are typically available in most applications, a The ADXRS642 RATEOUT, ST1, ST2, and TEMP signals are charge pump is included on chip. If an external 18 V to 20 V ratiometric to the V voltage; for example, the null voltage, RATIO supply is available, the two capacitors on CP1 to CP4 can be rate sensitivity and temperature outputs are proportional to omitted, and this supply can be connected to CP5 (Pin 6D, V . Therefore, it is most easily used with a supply-ratiometric RATIO Pin 7D). CP5 should not be grounded when power is applied to ADC, which results in self-cancellation of errors due to minor the ADXRS642. No damage occurs, but under certain conditions, supply variations. There is some small, usually negligible, error the charge pump may fail to start up after the ground is removed due to nonratiometric behavior. Note that to guarantee full rate without first removing power from the ADXRS642. range, V should not be greater than AV . RATIO CC Rev. A | Page 8 of 12

Data Sheet ADXRS642 MODIFYING THE MEASUREMENT RANGE MECHANICAL PERFORMANCE The ADXRS642 scale factor can be reduced to extend the The ADXRS642 excellent vibration rejection is demonstrated in measurement range to as much as ±450°/sec by adding a single Figure 15 and Figure 16. Figure 15 shows the ADXRS642 output 225 kΩ resistor between the RATEOUT and SUMJ. If an external response with and without 15 g rms 50 Hz to 5 kHz of random resistor is added between RATEOUT and SUMJ, C must be vibration. The bandwidth of the gyro was limited to 1600 Hz. OUT proportionally reduced to maintain the correct bandwidth. Performance is similar regardless of the direction of the input NULL ADJUSTMENT vibration. 1 The nominal 2.5 V null is for a symmetrical swing range at RATEOUT (1B, 2A). However, a nonsymmetric output swing may be suitable in some applications. Null adjustment is possible 0.1 by injecting a suitable current to SUMJ (1C, 2C). Note that supply disturbances may reflect some null instability. Digital supply noise 0.01 should be avoided, particularly in this case. Hz √ SELF-TEST FUNCTION 2s)/ (°/0.001 The ADXRS642 includes a self-test feature that actuates each of the sensing structures and associated electronics in the same manner, as if subjected to angular rate. It is activated by standard 0.0001 logic high levels applied to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1 causes the voltage at RATEOUT to change 0.00001 aseblof-utet s−t 0r.e3s pVo, nansed fSoTll2o wcasu tshees avnis ocopspiotysi ttee mchpaenrgaet uorfe + d0e.3p eVn. Tdehnec e 10 100FREQUENCY (Hz)1k 10k 09770-014 of the package atmosphere, approximately 0.25%/°C. Activating Figure 15. ADXRS642 Output Response with and Without Random Vibration (15 g rms, 50 Hz to 5 kHz) both ST1 and ST2 simultaneously is not damaging. ST1 and ST2 are fairly closely matched (±2%), but actuating both simultaneously Figure 16 demonstrates the ADXRS642 dc noise response to 5g may result in a small apparent null bias shift proportional to the sine vibration over the 20 Hz to 5 kHz range. As can be seen, degree of self-test mismatch. there are no sensitive frequencies present, and vibration rectification is vanishingly small. As in the previous example, ST1 and ST2 are activated by applying a voltage equal to V RATIO the gyro bandwidth was set to 1600 Hz. to the ST1 pin and the ST2 pin. The voltage applied to ST1 and ST2 must never be greater than AV . 0.12 CC CONTINUOUS SELF-TEST 0.10 The on-chip integration of the ADXRS642 gives it higher reliability 0.08 than is obtainable with any other high volume manufacturing method. Also, it is manufactured under a mature BiMOS process 0.06 that has field-proven reliability. As an additional failure detection measure, power-on self-test can be performed. However, some (°/s)0.04 applications may warrant continuous self-test while sensing rate. 0.02 Details outlining continuous self-test techniques are also available in the AN-768 Application Note. 0 –0.02 –0.04 10 100FREQUENCY (Hz)1k 10k 09770-015 Figure 16. ADXRS642 Sine Vibration Noise Response (5 g, 20 Hz to 5 kHz) Rev. A | Page 9 of 12

ADXRS642 Data Sheet OUTLINE DIMENSIONS 7.05 6.85 SQ *A1 CORNER CAO1 RBNAELRL 6.70 7 6 5 4 3 2 1 INDEX AREA A B 4.80 BSC SQ C 0.80 D BSC E F G TOP VIEW BOTTOM VIEW DETAIL A 3.80 MAX DETAIL A 3.20 MAX 0.60 MAX 2.50 MIN 0.25 MIN 0.60 COPLANARITY SEATING 0.55 0.15 PLANE 0.50 BALL DIAMETER * BTAOL TLH AE1 D ID/AE NPATIDF IIENRT EISR NGAOLLLDY P VLIAAT HEODL AENSD. CONNECTED 07-11-2012-B Figure 17. 32-Lead Ceramic Ball Grid Array [CBGA] (BG-32-3) Dimensions shown in millimeters ORDERING GUIDE Model1 Temperature Range Package Description Package Option ADXRS642BBGZ –40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3 ADXRS642BBGZ-RL –40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3 EVAL-ADXRS642Z Evaluation Board 1 Z = RoHS Compliant Part. Rev. A | Page 10 of 12

Data Sheet ADXRS642 NOTES Rev. A | Page 11 of 12

ADXRS642 Data Sheet NOTES ©2011–2012 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D09770-0-10/12(A) Rev. A | Page 12 of 12