±50°/s Yaw Rate Gyro ADXRS624 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip The ADXRS624 is a complete angular rate sensor (gyroscope) Z-axis (yaw rate) response that uses the Analog Devices, Inc., surface-micromachining High vibration rejection over wide frequency process to create a functionally complete and low cost angular 2000 g powered shock survivability rate sensor integrated with all required electronics on one chip. Ratiometric to referenced supply The manufacturing technique for this device is the same high 5 V single-supply operation volume BiMOS process used for high reliability automotive 105°C operation airbag accelerometers. Self-test on digital command Ultrasmall and light (<0.15 cc, <0.5 gram) The output signal, RATEOUT (1B, 2A), is a voltage proportional Temperature sensor output to angular rate about the axis normal to the top surface of the RoHS compliant package. The output is ratiometric with respect to a provided Qualified for automotive applications reference supply. A single external resistor between SUMJ and APPLICATIONS RATEOUT can be used to lower the scale factor. An external capacitor sets the bandwidth. Other external capacitors are Navigation systems required for operation. Inertial measurement units Platform stabilization A temperature output is provided for compensation techniques. Robotics Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal conditioning circuits. The ADXRS624 is available in a 7 mm × 7 mm × 3 mm BGA chip scale package. FUNCTIONAL BLOCK DIAGRAM +5V (ADC REF) 100nF +5V AVCC ST2 ST1 TEMP VRATIO AADDXXRRSS662244 100nF SELF-TEST 25kΩ 25kΩ AT 25°C AGND DEMOD DARMIVPE MESCEHNASNOICRAL AAMCP VGA +5V 200kΩ ±5% VDD CHARGE PUMP AND VOLTAGE 100nF REGULATOR PGND CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT 22nF 22nF 100nF COUT 08999-001 Figure 1. ADXRS624 Block Diagram Rev. A Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Tel: 781.329.4700 www.analog.com Trademarks and registered trademarks are the property of their respective owners. Fax: 781.461.3113 ©2010 Analog Devices, Inc. All rights reserved.

ADXRS624 TABLE OF CONTENTS Features .............................................................................................. 1 Theory of Operation .........................................................................9 Applications ....................................................................................... 1 Setting Bandwidth .........................................................................9 General Description ......................................................................... 1 Temperature Output and Calibration .........................................9 Functional Block Diagram .............................................................. 1 Calibrated Performance ................................................................9 Revision History ............................................................................... 2 ADXRS624 and Supply Ratiometricity ......................................9 Specifications ..................................................................................... 3 Null Adjustment ......................................................................... 10 Absolute Maximum Ratings ............................................................ 4 Self-Test Function ...................................................................... 10 Rate-Sensitive Axis ....................................................................... 4 Continuous Self-Test .................................................................. 10 ESD Caution .................................................................................. 4 Outline Dimensions ....................................................................... 11 Pin Configuration and Function Descriptions ............................. 5 Ordering Guide .......................................................................... 11 Typical Performance Characteristics ............................................. 6 Automotive Products ................................................................. 11 REVISION HISTORY 9/10—Rev. 0 to Rev. A Changes to Ordering Guide .......................................................... 11 4/10—Revision 0: Initial Version Rev. A | Page 2 of 12

ADXRS624 SPECIFICATIONS All minimum and maximum specifications are guaranteed; typical specifications are not guaranteed. At T = −40°C to +105°C, V = AV A S CC = V = 5 V, V = AV , angular rate = 0°/s, bandwidth = 80 Hz (C = 0.01 µF), I = 100 μA, ±1 g, unless otherwise noted. DD RATIO CC OUT OUT Table 1. ADXRS624BBGZ Parameter Conditions Min Typ Max Unit SENSITIVITY (RATIOMETRIC)1 Clockwise rotation is positive output Measurement Range2 Full-scale range over specifications range ±50 ±75 °/sec Initial and Over Temperature 22.5 25 27.5 mV/°/sec Temperature Drift3 ±3 % Nonlinearity Best fit straight line 0.1 % of FS NULL (RATIOMETRIC)1 Null −40°C to +105°C 2.5 V Linear Acceleration Effect Any axis 0.1 °/sec/g NOISE PERFORMANCE Rate Noise Density T = 25°C 0.04 °/sec/√Hz A FREQUENCY RESPONSE Bandwidth4 1 1000 Hz Sensor Resonant Frequency 14.5 kHz SELF-TEST (RATIOMETRIC)1 ST1 Rate-Out Response ST1 pin from Logic 0 to Logic 1 −1.9 V ST2 Rate-Out Response ST2 pin from Logic 0 to Logic 1 1.9 V Logic 1 Input Voltage 0.8 × V V RATIO Logic 0 Input Voltage 0.2 × V V RATIO Input Impedance To common 50 kΩ TEMPERATURE SENSOR (RATIOMETRIC)1 V at 25°C Load = 100 MΩ 2.35 2.5 2.65 V OUT Scale Factor5 At 25°C, V = 5 V 9 mV/°C RATIO Load to V 25 kΩ S Load to Common 25 kΩ TURN-ON TIME Power on to ±½°/sec of final 50 ms OUTPUT DRIVE CAPABILITY Current Drive For rated specifications 200 µA Capacitive Load Drive 1000 pF POWER SUPPLY Operating Voltage (V) 4.75 5.00 5.25 V S V Input 3 V V RATIO S Supply Current 3.5 5.0 mA TEMPERATURE RANGE Specified Performance –40 +105 °C 1 Parameter is linearly ratiometric with V . RATIO 2 The maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. 3 From +25°C to −40°C or from +25°C to +105°C. 4 Adjusted by the external capacitor, COUT. 5 For a change in temperature from 25°C to 26°C. V is ratiometric to V . See the Temperature Output and Calibration section for more details. TEMP RATIO Rev. A | Page 3 of 12

ADXRS624 ABSOLUTE MAXIMUM RATINGS RATE-SENSITIVE AXIS Table 2. Parameter Rating The ADXRS624 is a Z-axis rate-sensing device (also called a Acceleration (Any Axis, 0.5 ms) yaw rate-sensing device). It produces a positive going output Unpowered 2000 g voltage for clockwise rotation about the axis normal to the Powered 2000 g package top, that is, clockwise when looking down at the V AV –0.3 V to +6.0 V package lid. DD, CC V AV RATIO CC RATE RATE OUT Output Short-Circuit Duration Indefinite AXIS (Any Pin to Common) VCC = 5V LONGITUDINAL 4.75V Operating Temperature Range –55°C to +125°C AXIS + Storage Temperature –65°C to +150°C 7 VRATIO/2 RATE IN Stresses above those listed under the Absolute Maximum 1 Rstaretisnsg rsa tminagy ocnaulys;e f upnercmtioannaeln ot pdearmataigoen toof tthhee ddeevviiccee. aTth tihse isse a o r A1 LAATBECRADLE AFXGIS GND 0.25V 08999-002 Figure 2. RATEOUT Signal Increases with Clockwise Rotation any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute ESD CAUTION maximum rating conditions for extended periods may affect device reliability. Drops onto hard surfaces can cause shocks of greater than 2000 g and can exceed the absolute maximum rating of the device. Exercise care during handling to avoid damage. Rev. A | Page 4 of 12

ADXRS624 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS PGND VDD CP5 CP3 CP4 7 6 ST1 CP1 5 ST2 CP2 4 TEMP AVCC 3 2 1 AGND RATEOUT ` G F VRAETIO NDC SUCMJ B A 08999-003 Figure 3. Pin Configuration Table 3. Pin Function Descriptions Pin No. Mnemonic Description 6D, 7D CP5 HV Filter Capacitor (0.1 μF). 6A, 7B CP4 Charge Pump Capacitor (22 nF). 6C, 7C CP3 Charge Pump Capacitor (22 nF). 5A, 5B CP1 Charge Pump Capacitor (22 nF). 4A, 4B CP2 Charge Pump Capacitor (22 nF). 3A, 3B AV Positive Analog Supply. CC 1B, 2A RATEOUT Rate Signal Output. 1C, 2C SUMJ Output Amp Summing Junction. 1D, 2D NC No Connect. 1E, 2E V Reference Supply for Ratiometric Output. RATIO 1F, 2G AGND Analog Supply Return. 3F, 3G TEMP Temperature Voltage Output. 4F, 4G ST2 Self-Test for Sensor 2. 5F, 5G ST1 Self-Test for Sensor 1. 6G, 7F PGND Charge Pump Supply Return. 6E, 7E V Positive Charge Pump Supply. DD Rev. A | Page 5 of 12

ADXRS624 TYPICAL PERFORMANCE CHARACTERISTICS N > 1000 for all typical performance plots, unless otherwise noted. 35 45 40 30 %) %)35 ON (25 ON ( TI TI30 A A L L PU20 PU25 O O P P OF 15 OF 20 T T EN EN15 C10 C R R E E10 P P 5 5 0 1.6 1.7 1.8 1.9 2.0 2.1 2.2 2.3RA2.4TEO2.5UT2.6 (V2.7) 2.8 2.9 3.0 3.1 3.2 3.3 3.4 08999-004 0 –10 –8 –6 –4SENS–2ITIVIT0Y DRIF2T (%)4 6 8 10 08999-007 Figure 4. Null Output at 25°C (V = 5 V) Figure 7. Sensitivity Drift over Temperature RATIO 35 40 30 35 %) )% ON ( 25 ON (30 ULATI 20 ULATI25 P P PO PO20 OF 15 OF NT NT 15 E E C 10 C ER ER10 P P 5 5 0 0 –0.30 –0.25 –0.20 –0.15RAT–0.10EOUT–0.05 TEM0PCO0.05 (°/se0.10c/°C)0.15 0.20 0.25 0.30 08999-005 –2.10 –2.05 –2.00 –1.95 –1.90 –1.85 –1.80 S–1.75T1–1.70Δ (V–1.65) –1.60 –1.55 –1.50 –1.45 –1.40 –1.35 –1.30 08999-008 Figure 5. Null Drift over Temperature (V = 5 V) Figure 8. ST1 Output Change at 25°C (V = 5 V) RATIO RATIO 30 40 35 25 %) %) N ( N (30 O O ATI20 ATI25 UL UL OF POP15 OF POP20 CENT 10 CENT 15 R R10 PE PE 5 5 0 0 24.00 24.25 24.50 24.75 25.00SE25.25NSIT25.50IVIT25.75Y (m26.00V/°/s26.25ec)26.50 26.75 27.00 27.25 27.50 08999-006 1.30 1.35 1.40 1.45 1.50 1.55 1.60 S1.65T21.70Δ (V1.75) 1.80 1.85 1.90 1.95 2.00 2.05 2.10 08999-009 Figure 6. Sensitivity at 25°C (V = 5 V) Figure 9. ST2 Output Change at 25°C (V = 5 V) RATIO RATIO Rev. A | Page 6 of 12

ADXRS624 30 40 35 25 %) %) N ( N ( 30 O O TI 20 TI A A 25 L L U U P P PO 15 PO 20 F F O O T T 15 EN 10 EN C C R R 10 E E P P 5 5 0 0 50 54 58 62MEA66SURE70MEN74T RA78NGE82 (°/s86ec) 90 94 98 08999-010 2.40 2.42 2.44 2.46V2T.E4M8P O2.U5T0PU2T.5 2(V)2.54 2.56 2.58 2.60 08999-013 Figure 10. Measurement Range Figure 13. V Output at 25°C (V = 5 V) TEMP RATIO 2.5 3.3 2.0 3.1 1.5 2.9 1.0 Δ (V) 0.5 UT (V) 2.7 T P 2.5 S T E 0 U T O F- P 2.3 L–0.5 M E E S VT 2.1 –1.0 1.9 –1.5 –2.0 1.7 256 PARTS –2.5–40 –20 0 T2E0MPERA40TURE (6º0C) 80 100 120 08999-011 1.5–40 –20 0 T2E0MPERA40TURE (6°0C) 80 100 120 08999-014 Figure 11. Typical Self-Test Change over Temperature Figure 14. VTEMP Output over Temperature (VRATIO = 5 V) 30 60 REF 50 Y 25 %) X N ( 40 +45° O TI20 –45° A 30 L U s POP15 OR °/ 20 OF g T 10 EN10 C R 0 E P 5 –10 0 –20 2.52.62.72.82.93.03.13.23.33.4(m3.5A)3.63.73.83.94.04.14.24.34.44.5 08999-012 750 770 790TIME (ms)810 830 850 08999-015 Figure 12. Current Consumption at 25°C (V = 5 V) Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse RATIO Rev. A | Page 7 of 12

ADXRS624 2.0 0.10 LATITUDE 1.8 LONGITUDE RATE 1.6 0.05 s) 1.4 UT (°/ 1.2 ATEO 1.0 (°/s) 0 R K 0.8 A E P 0.6 –0.05 0.4 0.2 0100 FREQUE1NkCY (Hz) 10k 08999-016 –0.100 20 40 T6IM0E (Hou8r0s) 100 120 140 08999-019 Figure 16. Typical Response to 10 g Sinusoidal Vibration Figure 19. Typical Shift in 90 sec Null Averages Accumulated (Sensor Bandwidth = 2 kHz) over 140 Hours 400 0.10 300 DUT1 OFFSET BY +200°/s 200 0.05 100 (°/s) 0 (°/s) 0 –100 DUT2 OFFSET BY –200°/s –200 –0.05 –300 –4000 50 100 (ms) 150 200 250 08999-017 –0.100 600 1200TIME 1(S8e0c0onds)2400 3000 3600 08999-020 Figure 17. Typical High g (2500 g) Shock Response Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz) (Sensor Bandwidth = 40 Hz) 1 0.1 0.1 0.01 s) s) m (°/s rm s/ Hz r (°/ 0.01 0.001 0.0010.01 0.1 1AVERAG10E TIME 1(0S0econds1)k 10k 100k 08999-018 0.000110 100 (H1kz) 10k 100k 08999-021 Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz) Rev. A | Page 8 of 12

ADXRS624 THEORY OF OPERATION The ADXRS624 operates on the principle of a resonator gyro. 0.1 Two polysilicon sensing structures each contain a dither frame that is electrostatically driven to resonance, producing the 0.01 necessary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, oprlathceodg obneatwl teoe nth feix deidth peirc kmoofft ifoinng, earrse tmo ofovrambl ea fcinapgaercsit tivhea tp aicrek off s/ Hz rms) 0.001 structure that senses Coriolis motion. The resulting signal is fed (°/0.0001 to a series of gain and demodulation stages that produce the electrical rate signal output. The dual-sensor design rejects 0.00001 external g forces and vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in 0.000001 noisy environments. 10 100 (H1kz) 10k 100k 08999-022 The electrostatic resonator requires 18 V to 20 V for operation. Figure 22. Noise Spectral Density with Additional 250 Hz Filter Because only 5 V are typically available in most applications, a charge pump is included on-chip. If an external 18 V to 20 V TEMPERATURE OUTPUT AND CALIBRATION supply is available, the two capacitors on CP1 through CP4 can It is common practice to temperature-calibrate gyros to improve be omitted, and this supply can be connected to CP5 (Pin 6D, their overall accuracy. The ADXRS624 has a temperature Pin 7D). Note that CP5 should not be grounded when power is proportional voltage output that provides input to such a applied to the ADXRS624. Although no damage occurs, under calibration method. The temperature sensor structure is shown certain conditions the charge pump may fail to start up after the in Figure 23. The temperature output is characteristically ground is removed without first removing power from the nonlinear, and any load resistance connected to the TEMP ADXRS624. output results in decreasing the TEMP output and temperature coefficient. Therefore, buffering the output is recommended. SETTING BANDWIDTH External Capacitor C is used in combination with the on- The voltage at the TEMP pin (3F, 3G) is nominally 2.5 V at OUT chip R resistor to create a low-pass filter to limit the 25°C and V = 5 V. The temperature coefficient is ~9 mV/°C OUT RATIO bandwidth of the ADXRS624 rate response. The –3 dB at 25°C. Although the TEMP output is highly repeatable, it has frequency set by R and C is only modest absolute accuracy. OUT OUT fOUT = (2×π×R1 ×C ) VRATIO VTEMP OUT OUT and can be well controlled because ROUT is trimmed during RFIXED RTEMP 08999-023 manufacture to be 200 kΩ ± 1%. Any external resistor applied Figure 23. ADXRS624 Temperature Sensor Structure between the RATEOUT pin (1B, 2A) and SUMJ pin (1C, 2C) CALIBRATED PERFORMANCE results in (200kΩ×R ) Using a three-point calibration technique, it is possible to R = EXT calibrate the null and sensitivity drift of the ADXRS624 to an OUT (200kΩ+R ) EXT overall accuracy of nearly 200°/hour. An overall accuracy of 40°/hour or better is possible using more points. In general, an additional hardware or software filter is added to attenuate high frequency noise arising from demodulation Limiting the bandwidth of the device reduces the flat-band spikes at the gyro’s 14 kHz resonant frequency (the noise spikes noise during the calibration process, improving the measure- at 14 kHz can be clearly seen in the power spectral density ment accuracy at each calibration point. curve shown in Figure 21). Typically, this additional filter’s ADXRS624 AND SUPPLY RATIOMETRICITY corner frequency is set to greater than 5× the required band- width to preserve good phase response. The ADXRS624 RATEOUT and TEMP signals are ratiometric to the V voltage; that is, the null voltage, rate sensitivity, and Figure 22 shows the effect of adding a 250 Hz filter to the RATIO temperature outputs are proportional to V . Thus, the output of an ADXRS624 set to 40 Hz bandwidth (as shown in RATIO ADXRS624 is most easily used with a supply-ratiometric ADC Figure 21). High frequency demodulation artifacts are that results in self-cancellation of errors due to minor supply attenuated by approximately 18 dB. variations. There is some small error due to nonratiometric Rev. A | Page 9 of 12

ADXRS624 behavior. Typical ratiometricity error for null, sensitivity, self- SELF-TEST FUNCTION test, and temperature output is outlined in Table 4. The ADXRS624 includes a self-test feature that actuates each of the sensing structures and associated electronics as if subjected Note that V must never be greater than AV RATIO CC. to angular rate. The self-test feature is activated by standard logic high levels applied to Input ST1 (5F, 5G), Input ST2 (4F, Table 4. Ratiometricity Error for Various Parameters 4G), or both. ST1 causes the voltage at RATEOUT to change Parameter V = V = 4.75 V V = V = 5.25 V S RATIO S RATIO about −1.9 V, and ST2 causes an opposite change of +1.9 V. The ST1 self-test response follows the viscosity temperature dependence Mean −0.4% −0.3% of the package atmosphere, approximately 0.25%/°C. Sigma 0.6% 0.6% ST2 Activating both ST1 and ST2 simultaneously is not damaging. Mean −0.4% −0.3% ST1 and ST2 are fairly closely matched (±5%), but actuating Sigma 0.6% 0.6% both simultaneously may result in a small apparent null bias Null shift proportional to the degree of self-test mismatch. Mean −0.04% −0.02% Sigma 0.3% 0.2% ST1 and ST2 are activated by applying a voltage of greater than Sensitivity 0.8 × V to the ST1 and ST2 pins. ST1 and ST2 are deactivated RATIO Mean 0.03% 0.1% by applying a voltage of less than 0.2 × V to the ST1 and RATIO Sigma 0.1% 0.1% ST2 pins. The voltage applied to ST1 and ST2 must never be V greater than AV . TEMP CC Mean −0.3% −0.5% CONTINUOUS SELF-TEST Sigma 0.1% 0.1% The one-chip integration of the ADXRS624 gives it higher NULL ADJUSTMENT reliability than is obtainable with any other high volume The nominal 2.5 V null is for a symmetrical swing range at manufacturing method. In addition, it is manufactured RATEOUT (1B, 2A). However, a nonsymmetrical output swing under a mature BiMOS process with field-proven reliability. may be suitable in some applications. Null adjustment is As an additional failure detection measure, a power-on possible by injecting a suitable current to SUMJ (1C, 2C). Note self-test can be performed. However, some applications may that supply disturbances may reflect some null instability. warrant continuous self-test while sensing rate. Details Digital supply noise should be avoided particularly in this case. outlining continuous self-test techniques are also available in the AN-768 Application Note. Rev. A | Page 10 of 12

ADXRS624 OUTLINE DIMENSIONS 7.05 A1BALL 6.85SQ *IAN1DCEOXRANREERA CORNER 6.70 7 6 5 4 3 2 1 A B 4.80 BSCSQ C 0.80 D BSC E F G TOPVIEW BOTTOMVIEW DETAILA 3.80MAX DETAILA 3.20MAX 0.60MAX 2.50MIN 0.25MIN 0.60 COPLANARITY SEATING 0.55 0.15 PLANE 0.50 *BTAOLTLHAE1DID/AEPNATIDFIIENRTEISRNGAOLLLDYPVLIAATHEODBLAEANSLD.LDCIOANMNEETCETRED 10-26-2009-B Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA] (BG-32-3) Dimensions shown in millimeters ORDERING GUIDE Model1, 2 Temperature Range Package Description Package Option ADXRS624BBGZ –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3 ADXRS624BBGZ-RL –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3 ADXRS624WBBGZ –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3 ADXRS624WBBGZ-RL –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3 EVAL-ADXRS624Z Evaluation Board 1 Z = RoHS Compliant Part. 2 W = Qualified for Automotive Applications. AUTOMOTIVE PRODUCTS The ADXRS624WBBGZ models are available with controlled manufacturing to support the quality and reliability requirements of automotive applications. Note that these automotive models may have specifications that differ from the commercial models; therefore, designers should review the Specifications section of this data sheet carefully. Only the automotive grade products shown are available for use in automotive applications. Contact your local Analog Devices account representative for specific product ordering information and to obtain the specific Automotive Reliability reports for these models. Rev. A | Page 11 of 12

ADXRS624 NOTES ©2010 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D08999-0-9/10(A) Rev. A | Page 12 of 12

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