±250°/sec Yaw Rate Gyroscope ADXRS622 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip The ADXRS622 is a complete angular rate sensor (gyroscope) Z-axis (yaw rate) response that uses the Analog Devices, Inc., surface-micromachining High vibration rejection over wide frequency process to make a functionally complete and low cost angular 2000 g powered shock survivability rate sensor, integrated with all of the required electronics on Ratiometric to referenced supply one chip. The manufacturing technique for this device is the 5 V single-supply operation same high volume BiMOS process used for high reliability 105°C operation automotive airbag accelerometers. Self-test on digital command The ADXRS622 is an automotive grade gyroscope that has Ultrasmall and light: <0.15 cc, <0.5 gram 100% pin, package, temperature, and function compatible to the Temperature sensor output available industrial grade ADXRS652 gyroscope. Automotive RoHS compliant grade gyroscopes have more extensive guaranteed minimum/ Qualified for automotive applications maximum specifications due to automotive testing. APPLICATIONS The output signal, RATEOUT (1B, 2A), is a voltage proportional to the angular rate about the axis that is normal to the top surface of Vehicle chassis rollover sensing the package. The output is ratiometric with respect to a provided Inertial measurement units reference supply. An external capacitor sets the bandwidth. Other Platform stabilization external capacitors are required for operation. A temperature output is provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal condi- tioning circuits. The ADXRS622 is available in a 7 mm × 7 mm × 3 mm BGA chip-scale package. FUNCTIONAL BLOCK DIAGRAM 5V (ADC REF) 100nF 5V AVCC ST2 ST1 TEMP VRATIO ADXRS622 100nF SELF-TEST 25kΩ 25kΩ @ 25°C AGND DEMOD DARMIVPE MESCEHNASNOICRAL AAMCP VGA 5V 180kΩ ±1% VDD CHARGE PUMP AND VOLTAGE 100nF REGULATOR PGND CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT 22nF 22nF 100nF COUT 07754-001 Figure 1. Rev. C Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Tel: 781.329.4700 www.analog.com Trademarks and registered trademarks are the property of their respective owners. Fax: 781.461.3113 ©2009–2010 Analog Devices, Inc. All rights reserved.

ADXRS622 TABLE OF CONTENTS Features .............................................................................................. 1 Theory of Operation .........................................................................9 Applications ....................................................................................... 1 Setting Bandwidth .........................................................................9 General Description ......................................................................... 1 Temperature Output and Calibration .........................................9 Functional Block Diagram .............................................................. 1 Calibrated Performance ................................................................9 Revision History ............................................................................... 2 ADXRS622 and Supply Ratiometricity ................................... 10 Specifications ..................................................................................... 3 Null Adjustment ......................................................................... 10 Absolute Maximum Ratings ............................................................ 4 Self-Test Function ...................................................................... 10 Rate Sensitive Axis ....................................................................... 4 Continuous Self-Test .................................................................. 10 ESD Caution .................................................................................. 4 Outline Dimensions ....................................................................... 11 Pin Configuration and Function Descriptions ............................. 5 Ordering Guide .......................................................................... 11 Typical Performance Characteristics ............................................. 6 Automotive Products ................................................................. 11 REVISION HISTORY 9/10—Rev. B to Rev. C Changes to Ordering Guide .......................................................... 11 8/10—Rev. A to Rev. B Changes to Features Section and General Description Section . 1 Added Automotive Applications Section .................................... 11 2/10—Rev. 0 to Rev. A Updated Outline Dimensions ....................................................... 11 Changes to Ordering Guide .......................................................... 11 2/09—Revision 0: Initial Version Rev. C | Page 2 of 12

ADXRS622 SPECIFICATIONS All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. T = −40°C to +105°C, V = AV = V = 5 V, V = AV , angular rate = 0°/sec, bandwidth = 80 Hz (C = 0.01 µF), I = 100 µA, A S CC DD RATIO CC OUT OUT ±1 g, unless otherwise noted. Table 1. Parameter Conditions Min Typ Max Unit SENSITIVITY1 Clockwise rotation is positive output Measurement Range2 Full-scale range over specifications range ±250 ±300 °/sec Initial and Over Temperature −40°C to +105°C 6.2 7.0 7.8 mV/°/sec Temperature Drift3 ±2 % Nonlinearity Best fit straight line 0.1 % of FS NULL1 Null −40°C to +105°C 2.15 2.5 2.85 V Linear Acceleration Effect Any axis 0.1 °/sec/g NOISE PERFORMANCE Rate Noise Density T ≤ 25°C 0.06 °/sec/√Hz A FREQUENCY RESPONSE Bandwidth4 0.01 2500 Hz Sensor Resonant Frequency 12 14.5 17 kHz SELF-TEST1 ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 −750 −525 −300 mV ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 300 525 750 mV ST1 to ST2 Mismatch5 −5 +5 % Logic 1 Input Voltage 3.3 V Logic 0 Input Voltage 1.7 V Input Impedance To common 40 50 100 kΩ TEMPERATURE SENSOR1 V at 25°C Load = 10 MΩ 2.35 2.5 2.65 V OUT Scale Factor6 @ 25°C, V = 5 V 9 mV/°C RATIO Load to V 25 kΩ S Load to Common 25 kΩ TURN-ON TIME Power on to ±½°/sec of final 50 ms OUTPUT DRIVE CAPABILITY Current Drive For rated specifications 200 µA Capacitive Load Drive 1000 pF POWER SUPPLY Operating Voltage (V) 4.75 5.00 5.25 V S Quiescent Supply Current 3.5 4.5 mA TEMPERATURE RANGE Specified Performance −40 +105 °C 1 Parameter is linearly ratiometric with V . RATIO 2 Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. 3 From +25°C to −40°C or +25°C to +105°C. 4 Adjusted by external capacitor, C . Reducing bandwidth below 0.01 Hz does not result in further noise improvement. OUT 5 Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2). 6 Scale factor for a change in temperature from 25°C to 26°C. V is ratiometric to V . See the Temperature Output and Calibration section for more information. TEMP RATIO Rev. C | Page 3 of 12

ADXRS622 ABSOLUTE MAXIMUM RATINGS RATE SENSITIVE AXIS Table 2. Parameter Rating The ADXRS622 is a Z-axis rate-sensing device (also called a Acceleration (Any Axis, 0.5 ms) yaw rate-sensing device). It produces a positive going output Unpowered 2000 g voltage for clockwise rotation about the axis normal to the Powered 2000 g package top, that is, clockwise when looking down at the V , AV −0.3 V to +6.0 V package lid. DD CC V AV RATIO CC ST1, ST2 AV CC RATE Output Short-Circuit Duration Indefinite AXIS RATE OUT (Any Pin to Common) VCC = 5V Operating Temperature Range −55°C to +125°C LONGITUDINAL 4.75V AXIS + Storage Temperature Range −65°C to +150°C 7 VRATIO/2 RATE IN 1 SRtarteisnsgess mabaoyv cea tuhsoes pe elirsmteadn uenntd dera mthaeg Ae btoso tlhuet ed Mevaicxeim. Tuhmis is a A1 LAATBECRADLE AFXGIS GND 0.25V 07754-002 Figure 2. RATEOUT Signal Increases with Clockwise Rotation stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute ESD CAUTION maximum rating conditions for extended periods may affect device reliability. Drops onto hard surfaces can cause shocks of >2000 g and can exceed the absolute maximum rating of the device. Exercise care during handling to avoid damage. Rev. C | Page 4 of 12

ADXRS622 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS PGND VDD CP5 CP3 CP4 7 6 ST1 CP1 5 ST2 CP2 4 TEMP AVCC 3 2 1 AGND RATEOUT G F VRAETIO NDC SUCMJ B A 07754-023 Figure 3. Pin Configuration Table 3. Pin Function Descriptions Pin No. Mnemonic Description 6D, 7D CP5 HV Filter Capacitor (0.1 µF). 6A, 7B CP4 Charge Pump Capacitor (22 nF). 6C, 7C CP3 Charge Pump Capacitor (22 nF). 5A, 5B CP1 Charge Pump Capacitor (22 nF). 4A, 4B CP2 Charge Pump Capacitor (22 nF). 3A, 3B AV Positive Analog Supply. CC 1B, 2A RATEOUT Rate Signal Output. 1C, 2C SUMJ Output Amp Summing Junction. 1D, 2D NC No Connect. 1E, 2E V Reference Supply for Ratiometric Output. RATIO 1F, 2G AGND Analog Supply Return. 3F, 3G TEMP Temperature Voltage Output. 4F, 4G ST2 Self-Test for Sensor 2. 5F, 5G ST1 Self-Test for Sensor 1. 6G, 7F PGND Charge Pump Supply Return. 6E, 7E V Positive Charge Pump Supply. DD Rev. C | Page 5 of 12

ADXRS622 TYPICAL PERFORMANCE CHARACTERISTICS N > 1000 for all typical performance plots, unless otherwise noted. 20 35 18 30 16 OF POPULATION111024 OF POPULATION122505 PERCENT 68 PERCENT10 4 5 2 0 0 2.20 2.25 2.30 2.35 2.40 2.45 (V2.50) 2.55 2.60 2.65 2.70 2.75 2.80 07754-004 –10 –8 –6PER–4CENT–2 CHAN0GE F2ROM 245°C 6 8 10 07754-007 Figure 4. Null Output at 25°C (V = 5 V) Figure 7. Sensitivity Drift over Temperature RATIO 70 40 35 60 ON ON30 TI50 TI A A UL UL25 OP40 OP F P F P20 O O T30 T N N15 E E C C PER20 PER10 10 5 0 0 –400 –350 –300 –250 –200 –150mV–100DR–50IFT0FRO50M21005°C150 200 250 300 350 400 07754-005 –675 –650 –625 –600 –575 –550(m–525V) –500 –475 –450 –425 –400 –375 07754-008 Figure 5. Null Drift over Temperature (V = 5 V) Figure 8. ST1 Output Change at 25°C (V = 5 V) RATIO RATIO 30 40 35 25 ON ON30 TI TI A20 A UL UL25 P P O O F P15 F P20 O O T T CEN10 CEN15 R R PE PE10 5 5 0 0 6.3 6.4 6.5 6.6 6.7 6.8 6.9(m7.0V/°/s7.1ec)7.2 7.3 7.4 7.5 7.6 7.7 7.8 07754-006 375 400 425 450 475 500(m525V) 550 575 600 625 650 675 07754-009 Figure 6. Sensitivity at 25°C (V = 5 V) Figure 9. ST2 Output Change at 25°C (V = 5 V) RATIO RATIO Rev. C | Page 6 of 12

ADXRS622 70 30 60 25 N N O O TI50 TI A A20 L L U U OP40 OP F P F P15 O O T30 T N N CE CE10 ER20 ER P P 5 10 0 0 –5 –4 –3 –2PERC–1ENT 0MISMA1TCH2 3 4 5 07754-010 2.35 2.37 2.39 2.41 2.43 (V2.45) 2.47 2.49 2.51 2.53 2.55 07754-013 Figure 10. Self-Test Mismatch at 25°C (V = 5 V) Figure 13. V Output at 25°C (V = 5 V) RATIO TEMP RATIO 600 3.3 3.1 400 2.9 ST2 200 2.7 2.5 mV) 0 (V) ( 2.3 200 2.1 ST1 1.9 400 1.7 600–50 –30 –10 T1E0MPERA30TURE (5°0C) 70 90 110 07754-011 1.5–50 –25 0 TEM2P5ERATUR5E0 (°C) 75 100 07754-114 Figure 11. Typical Self-Test Change over Temperature Figure 14. V Output over Temperature, 256 Parts (V = 5 V) TEMP RATIO 30 60 REF 50 Y 25 X N TIO 40 +45° ULA20 30 –45° OF POP15 OR °/sec 20 ENT g 10 C10 R E P 0 5 –10 0 –20 2.5 2.7 2.9 3.1 3.3 (m3.5A) 3.7 3.9 4.1 4.3 4.5 07754-012 750 770 790TIME (ms)810 830 850 07754-014 Figure 12. Current Consumption at 25°C (V = 5 V) Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse RATIO Rev. C | Page 7 of 12

ADXRS622 2.0 0.10 LAT 1.8 LONG RATE 1.6 0.05 s) 1.4 UT (°/ 1.2 O c) RATE 1.0 (°/se 0 K 0.8 A E P 0.6 –0.05 0.4 0.2 0100 FREQUE1NkCY (Hz) 10k 07754-116 –0.100 20 40 T6IM0E (Hou8r0s) 100 120 140 07754-018 Figure 16. Typical Response to 10 g Sinusoidal Vibration Figure 19. Typical Shift in 90 sec Null Averages Accumulated (Sensor Bandwidth = 40 Hz) over 140 Hours 400 0.10 300 DUT1 OFFSET BY +200°/sec 200 0.05 100 (°/sec) 0 (°/sec) 0 –100 DUT2 OFFSET BY –200°/sec –200 –0.05 –300 –4000 50 100TIME (ms)150 200 250 07754-016 –0.100 600 1200TIME 1(S8e0c0onds)2400 3000 3600 07754-019 Figure 17. Typical High g (2500 g) Shock Response Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz) (Sensor Bandwidth = 40 Hz) 1 0.1 0.1 0.01 (°/sec rms) sec/ Hz rms) 0.01 (°/0.001 0.001 0.01 0.1 A1VERAG1IN0G TIME1 0(0Second1sk) 10k 100k 07754-017 0.000110 100 (H1kz) 10k 100k 07754-020 Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz) Rev. C | Page 8 of 12

ADXRS622 THEORY OF OPERATION The ADXRS622 operates on the principle of a resonator gyro. 0.1 Two polysilicon sensing structures each contain a dither frame that is electrostatically driven to resonance, producing the neces- 0.01 sary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, orthogonal to s) m 0.001 the dither motion, are movable fingers that are placed between Hz r fixed pickoff fingers to form a capacitive pickoff structure that c/ e senses Coriolis motion. The resulting signal is fed to a series of (°/s0.0001 gain and demodulation stages that produce the electrical rate signal output. The dual-sensor design rejects external g-forces and 0.00001 vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments. 0.000001 TBehcea eulseec tornolsyta 5t iVc r aerseo ntyaptoicra rlleyq auviraeilsa 1b8le V in t om 2o0s tV a pfoprl iocapteiroantsio, n . 10 100 (H1kz) 10k 100k 07754-021 Figure 22. Noise Spectral Density with Additional 250 Hz Filter a charge pump is included onchip. If an external 18 V to 20 V supply is available, the two capacitors on CP1 from CP4 can TEMPERATURE OUTPUT AND CALIBRATION be omitted, and this supply can be connected to the CP5 pin It is common practice to temperature-calibrate gyros to improve (6D, 7D). Note that CP5 should not be grounded when power is their overall accuracy. The ADXRS622 has a temperature propor- applied to the ADXRS622. Although no damage occurs, under tional voltage output that provides input to such a calibration certain conditions the charge pump may fail to start up after the method. The temperature sensor structure is shown in Figure 23. ground is removed if power is not first removed from the The temperature output is characteristically nonlinear, and any ADXRS622. load resistance connected to the TEMP output results in decreasing SETTING BANDWIDTH the TEMP output and its temperature coefficient. Therefore, buffering the output is recommended. External Capacitor C is used in combination with the on- OUT chip R resistor to create a low-pass filter to limit the bandwidth The voltage at the TEMP pin (3F, 3G) is nominally 2.5 V at 25°C, OUT of the ADXRS622 rate response. The −3 dB frequency set by and V = 5 V. The temperature coefficient is ~9 mV/°C at RATIO R and C is 25°C. Although the TEMP output is highly repeatable, it has OUT OUT ( ) only modest absolute accuracy. f =1/2×π×R ×C OUT OUT OUT and can be well controlled because R has been trimmed VRATIO VTEMP OUT dapuprilniegd m beatnwuefeanct uthrein RgA toT EbOe 1U8T0 pkiΩn ±(1 1B%, 2. AA)n ayn edx tSeUrnMalJ rpeisnis tor RFIXED RTEMP 07754-022 (1C, 2C) results in Figure 23. ADXRS622 Temperature Sensor Structure ( )( ) R = 180kΩ×R /180kΩ+R CALIBRATED PERFORMANCE OUT EXT EXT In general, an additional hardware or software filter is added to Using a three-point calibration technique, it is possible to attenuate high frequency noise arising from demodulation spikes calibrate the ADXRS622 null and sensitivity drift to an overall at the 14 kHz resonant frequency of the gyro. The noise spikes accuracy of nearly 200°/hour. An overall accuracy of 40°/hour at 14 kHz can be clearly seen in the power spectral density or better is possible using more points. curve, shown in Figure 21. Typically, this additional filter corner Limiting the bandwidth of the device reduces the flat-band noise frequency is set to greater than 5× the required bandwidth to during the calibration process, improving the measurement preserve good phase response. accuracy at each calibration point. Figure 22 shows the effect of adding a 250 Hz filter to the output of an ADXRS622 set to 40 Hz bandwidth (as shown in Figure 21). High frequency demodulation artifacts are attenuated by approximately 18 dB. Rev. C | Page 9 of 12

ADXRS622 ADXRS622 AND SUPPLY RATIOMETRICITY NULL ADJUSTMENT The ADXRS622 RATEOUT and TEMP signals are ratiometric The nominal 2.5 V null is for a symmetrical swing range at to the VRATIO voltage, that is, the null voltage, rate sensitivity, and RATEOUT (1B, 2A). However, a nonsymmetric output swing temperature outputs are proportional to VRATIO. Therefore, the may be suitable in some applications. Null adjustment is possible ADXRS622 is most easily used with a supply-ratiometric analog- by injecting a suitable current to SUMJ (1C, 2C). Note that supply to-digital converter (ADC) that results in self-cancellation of errors disturbances may reflect some null instability. Digital supply noise due to minor supply variations. should be avoided, particularly in this case. There is some small error due to nonratiometric behavior. Typical SELF-TEST FUNCTION ratiometricity error for null, sensitivity, self-test, and temperature The ADXRS622 includes a self-test feature that actuates each of output is outlined in Table 4. the sensing structures and associated electronics as if subjected Note that V must never be greater than AV . RATIO CC to angular rate. It is activated by standard logic high levels applied to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1 causes Table 4. Ratiometricity Error for Various Parameters the voltage at RATEOUT to change about 0−.5 V, and ST2 causes Parameter V = V = 4.85 V V = V = 5.15 V S RATIO S RATIO an opposite change of +0.5 V. The self-test response follows the ST1 viscosity temperature dependence of the package atmosphere, Mean 0.3% 0.09% approximately 0.25%/°C. Sigma 0.21% 0.19% ST2 Activating both ST1 and ST2 simultaneously is not damaging. Mean −0.15% −0.2% ST1 and ST2 are fairly closely matched (±5%), but actuating Sigma 0.22% 0.2% both simultaneously may result in a small apparent null bias Null shift proportional to the degree of self-test mismatch. Mean −0.3% −0.05% ST1 and ST2 are activated by applying a voltage equal to V RATIO Sigma 0.2% 0.08% to the ST1 pin and the ST2 pin. The voltage applied to ST1 and Sensitivity ST2 must never be greater than AV . CC Mean 0.003% −0.25% CONTINUOUS SELF-TEST Sigma 0.06% 0.06% The on-chip integration of the ADXRS622 gives it higher reliability V TEMP than is obtainable with any other high volume manufacturing Mean −0.2% −0.04% method. In addition, it is manufactured under a mature BIMOS Sigma 0.05% 0.06% process that has field-proven reliability. As an additional failure detection measure, power-on self-test can be performed. However, some applications may warrant continuous self-test while sensing rate. Details outlining continuous self-test techniques are also available in the AN-768 Application Note. Rev. C | Page 10 of 12

ADXRS622 OUTLINE DIMENSIONS 7.05 A1BALL 6.85SQ *IAN1DCEOXRANREERA CORNER 6.70 7 6 5 4 3 2 1 A B 4.80 BSCSQ C 0.80 D BSC E F G TOPVIEW BOTTOMVIEW DETAILA 3.80MAX DETAILA 3.20MAX 0.60MAX 2.50MIN 0.25MIN 0.60 COPLANARITY SEATING 0.55 0.15 PLANE 0.50 *BTAOLTLHAE1DID/AEPNATIDFIIENRTEISRNGAOLLLDYPVLIAATHEODBLAEANSLD.LDCIOANMNEETCETRED 10-26-2009-B Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA] (BG-32-3) Dimensions shown in millimeters ORDERING GUIDE Model1, 2 Temperature Range Package Description Package Option ADXRS622BBGZ −40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3 ADXRS622BBGZ-RL −40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3 ADXRS622WBBGZA −40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3 ADXRS622WBBGZA-RL −40°C to +105°C 32-Lead Ceramic Ball Grid Array [CBGA] BG-32-3 EVAL-ADXRS622Z Evaluation Board 1 Z = RoHS Compliant Part. 2 W = Qualified for Automotive Applications. AUTOMOTIVE PRODUCTS The ADXRS622W models are available with controlled manufacturing to support the quality and reliability requirements of automotive applications. Note that these automotive models may have specifications that differ from the commercial models; therefore, designers should review the Specifications section of this data sheet carefully. Only the automotive grade products shown are available for use in automotive applications. Contact your local Analog Devices account representative for specific product ordering information and to obtain the specific Automotive Reliability reports for these models. Rev. C | Page 11 of 12

ADXRS622 NOTES ©2009–2010 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D07754-0-9/10(C) Rev. C | Page 12 of 12

Mouser Electronics Authorized Distributor Click to View Pricing, Inventory, Delivery & Lifecycle Information: A nalog Devices Inc.: ADXRS622BBGZ-RL ADXRS622BBGZ EVAL-ADXRS622Z