a 3.3V Single and Dual Axis  Automotive iMEMS Accelerometers AD22300, AD22301, AD22302 FEATURES • Complete Acceleration Measurement System on a Single Monolithic IC • ±35g, ±70g and ±70g/±35g Ranges Available • Smallest Available Package Footprint For Automotive Safety Applications • 8 pin Leadless Chip Carrier • Full Differential Sensor & Circuitry for High Resistance to EMI/RFI • Environmentally robust packaging • Complete Mechanical and Electrical Self-test on Digital Command • Output Ratiometric to Supply • Sensitive Axes in the Plane of the Chip • High Linearity (0.2% of Full-scale) • Frequency Response Down To DC • Supply Voltage (3.3V) • Low-Power Consumption (1.3 mA single and dual axis) • Tight Sensitivity Tolerance and Zero g Offset capability • Higher Output Drive Current • Largest available pre-filter clipping headroom • 400 Hz, 2 pole Bessel Filter GENERAL DESCRIPTION The AD22300, AD22301, and AD22302 are derivative products of the fourth generation ADXL78 family surface micromachined iMEMS accelerometers from Analog Devices with enhanced performance and lower cost. Designed for use in airbag applications, these products also provide complete cost-effective solutions useful for a wide variety of other applications. The AD22300 and AD22301 are single-axis accelerometers with g-ranges of ±37g or ±70g. The AD22302 is a monolithic two-axis (XY) version with the sensor axes orthogonal (90°) to each other and in the plane of the chip. The AD22302 X-axis has a g-range of ±70g and its Y-axis has a g-range of ±37g. It can be used for sensing crashes in the front or side of the vehicle and to determine the angle of impact. The AD22300, AD22301, and AD22302 are temperature stable and accurate over the automotive temperature range, with a self-test feature that fully exercises all the mechanical and electrical elements of the sensor with a digital signal applied to a single pin. Vs AD22302 Vdd AD22300/1 Vdd2 Timing Vs Vdd Exc DSeinffseorrential DAemmpod 4BF0iel0tsesHre zl XOUT Generator Vdd2 Vdd3 Timing Exc DSeifnfseorre ntial DAemmpo d 4BF0iel0tsesHre zl XOUT Generator Exc DSeinffseorrential DAemmpod 4BF0iel0tsesHre zl YOUT Self Test Self Test http://www.analog.com/iMEMS All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change 1 without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

AD22300, AD22301 - AUTOMOTIVE GRADE SPECIFICATIONS ( @ T = -40°C to +105°C, 3.3V DC ± 5%, Acceleration = 0g; unless otherwise noted) A AD22300 AD22301 Conditions min typ max min typ max units Sensor Output Full Scale Range I ≤ ±100µA ±37 ±70 g OUT I ≤ ±250µA ±35 ±67 g OUT Nonlinearity 0.2 2 0.2 2 % Package alignment error 1 1 degree Cross-axis sensitivity -5 5 -5 5 % Resonant frequency 24 24 kHz Sensitivity, Ratiometric Vdd=3.3V, 100Hz, 25C 33.94 36.3 38.66 16.66 17.82 18.98 mV/g -6.5 6.5 -6.5 6.5 % Vdd=3.3V±5%, 100Hz, temp 10.28 11 11.72 5.05 5.4 5.75 mV/V/gee -6.5 6.5 -6.5 6.5 % Offset Zero-g output voltage Vdd=3.3V, 25C 1.51 1.65 1.79 1.56 1.65 1.74 V error over temp -42.42 42.42 -27.27 27.27 mV/V Noise Noise density 10Hz-400Hz, 3.3V 1.67 4.6 2.7 5.3 mg/rt Hz Clock Noise 3.3 3.3 mV p-p Frequency Response 2 pole Bessel -3dB frequency 360 400 440 360 400 440 Hz -3dB frequency drift 25 deg C to T or T 6 6 Hz MIN MAX Self Test Output change (cubic vs. Vdd) Vdd=3.3V 108 158 212 60 90 120 mV Logic input high Vdd-0.8 Vdd-0.8 V Logic input low 0.8 0.8 V Turn on time to 90% of final value 1 1 ms Input resistance pull-down resistor to ground 30 50 30 50 kΩ Output Amplifier Output voltage swing I ≤ ±100µA 0.1 Vdd-0.1 0.1 Vdd-0.1 V OUT I ≤ ±250µA 0.25 Vdd-0.25 0.25 Vdd-0.25 V OUT Capacitive load drive 1000 1000 pF Pre-filter Headroom 210 420 g CFSR 5 3 V/V Power Supply (Vdd) 3.135 3.3 3.465 3.135 3.3 3.465 V Functional Voltage Range 3.135 6 3.135 6 V Supply current 0.4 0.8 2 0.4 0.8 2 mA Temperature Range -40 105 -40 105 deg C All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change 2 without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

AD22302 - AUTOMOTIVE GRADE SPECIFICATIONS ( @ TA = -40°C to +105°C, 3.3V DC ± 5%, Acceleration = 0g; unless otherwise noted) AD22302 Conditions min typ max units Sensor Output Full Scale Range I ≤ ±100µA x axis: ±70 g OUT y axis: ±37 g I ≤ ±250µA x axis: ±67 g OUT y axis: ±35 g Nonlinearity 0.2 2 % Package alignment error 1 degree Sensor to sensor alignment error 0.1 degree Cross-axis sensitivity -5 5 % Resonant frequency 24 kHz Sensitivity, Ratiometric Vdd=3.3V, 100Hz, 25C x: 16.66 17.82 18.98 mV/g -6.5 6.5 % y: 33.94 36.3 38.66 mV/g -6.5 6.5 % Vdd=3.3V± 5%, 100Hz, temp x: 5.05 5.4 5.75 mV/V/gee -6.5 6.5 % y: 10.28 11 11.72 mV/g -6.5 6.5 % Offset Zero-g output voltage Vdd=3.3V, 25C x: 1.56 1.65 1.74 V error over temp -27.27 27.27 mV/V Vdd=3.3V, 25C y: 1.51 1.65 1.79 V error over temp -42.42 42.42 mV/V Noise Noise density 10Hz-400Hz, 3.3V x: 2.7 5.3 mg/rt Hz y: 1.67 4.6 mg/rt Hz Clock Noise x / y: 3.3 mV p-p Frequency Response 2 pole Bessel -3dB frequency 360 400 440 Hz -3dB frequency drift 25 deg C to T or T 6 Hz MIN MAX Self Test Output change (cubic vs. Vdd) Vdd=3.3V x: 60 90 120 mV y: 108 158 212 mV Logic input high Vdd-0.8 V Logic input low 0.8 V Turn on time to 90% of final value 1 ms Input resistance pull-down resistor to ground 30 50 kΩ Output Amplifier Output voltage swing I ≤ ±100µA x / y : 0.1 Vdd-0.1 V OUT I ≤ ±250µA x / y : 0.25 Vdd-0.25 V OUT Capacitive load drive 1000 pF Pre-filter Headroom x: 420 g y: 210 CFSR x: 3 V/V y: 6 Power Supply (Vdd) 3.135 3.3 3.465 V Functional Voltage Range 3.135 6 V Supply current 0.6 1.0 2 mA Temperature Range -40 105 deg C All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change 3 without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

ABSOLUTE MAXIMUM RATINGS* Acceleration (Any Axis, Unpowered and Powered) 4000 g Supply Voltage Vs -0.3 to 7.0V Output Short Circuit Duration (Vout, to Ground) Indefinite Storage Temperature -65°C to 150°C Soldering Temperature Range (Soldering 10 sec) 245°C Drop Test 1.2 m Operating Temp Range -55°C to 125°C * Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; the functional operation of the device at these or any other conditions beyond those indicated in the operational sections of this specification is not implied. Absolute maximum ratings apply individually only, not in combination. ORDERING GUIDE Standard Devices G Range Branding AD22300 ± 35g AD22300 AD22301 ± 70g AD22301 AD22302 ± 70g X, ± 35g Y AD22302 PIN FUNCTION DESCRIPTIONS 8-Pin LCC Pin AD22300/01 Description Pin AD22302 Description 1 NC No internal connection 1 Vdd3 Power Supply 2 NC No internal connection 2 Yout Voltage Output Y 3 COM Common (connected to package lid) 3 COM Common(connected to package lid) 4 Self-Test Self Test Input 4 Self-Test Self Test Input 5 NC No internal connection 5 NC No internal connection 6 Xout Voltage Output X 6 Xout Voltage Output X 7 Vdd Power Supply 7 Vdd Power Supply 8 Vdd2 Power Supply 8 Vdd2 Power Supply Z (Dimensions are nominal only. For tolerances, see the Package Outline Drawing for this part.) All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change 4 without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03

Theory of Operation The ADXL78 family provides a fully differential sensor structure and circuit path, resulting in the industry’s highest resistance to EMI/RFI effects. This latest generation uses electrical feedback with zero force feedback for improved accuracy and stability. The sensor resonant frequency is significantly higher than the signal bandwidth set by the on-chip filter, avoiding the signal analysis problems caused by resonant peaks near the signal bandwidth. Figure 1 is a simplified view of one of the differential sensor elements. Each sensor includes several differential capacitor unit cells. Each cell is composed of fixed plates attached to the substrate, and movable plates attached to the frame. Displacement of the frame changes the differential capacitance, which is measured by the on-chip circuitry. ANCHOR PLATE MOVABLE CAPACITORS FRAME FIXED ON PLATES TI A ER UNIT SENSING EL CELL C UNIT FORCING AC MOVING CELL PLATE ANCHOR Figure 1. Simplified View of Sensor Under Acceleration Complementary 400kHz square waves drive the fixed plates (200 kHz for the ADXL278). Electrical feedback adjusts the amplitudes of the square waves such that the AC signal on the moving plates is zero. The feedback signal is linearly proportional to the applied acceleration. This unique feedback technique ensures that there is no net electrostatic force applied to the sensor. The differential feedback control signal is also applied to the input of the filter, where it is filtered and converted to a single-ended signal. Self-Test The fixed fingers in the forcing cells are normally kept at the same potential as that of the movable frame. When the self-test digital input is activated, the voltage on the fixed fingers on one side of the moving plate in the forcing cells is changed. This creates an attractive electrostatic force, which causes the frame to move towards those fixed fingers. The entire signal channel is active, so the sensor displacement causes a change in Vout. The ADXL78 self-test function is a comprehensive method of verifying the operation of the accelerometer. Because electrostatic force is independent of the polarity of the voltage across capacitor plates, a positive voltage is applied in half of the forcing cells, and its complement in the other half of the forcing cells. Activating self-test causes a step function force to be applied to the sensor, while the capacitive coupling term is canceled. The ADXL78 has improved self- test functionality including excellent transient response and high-speed switching capability. Arbitrary force waveforms can be applied to the sensor by modulating the self-test input, such as test signals to measure the system frequency response, or even crash signals to verify algorithms within the limits of the selftest swing. All minimum and maximum specifications are guaranteed; typical values are not guaranteed nor tested. Product characteristics and specifications are subject to change 5 without notice. Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending. Rev. 03